12 Inch Bevel Etcher

Catalog NO.: AIMRSE-NRDE-054 Category: Nanotechnology R&D Equip

12 Inch Bevel Etcher is used in Logic, 3D-NAND, and DRAM processes. It removes polymer from the wafer edge via plasma to reduce defects and improve yield. It features adjustable process pressure, gap, and etch distance on both the wafer frontside and backside.