12 Inch Silicon Etcher
Catalog NO.: AIMRSE-NRDE-058 Category: Nanotechnology R&D Equip
12 Inch Silicon Etcher is a 12-inch dry etcher for silicon etching, applied in Logic, 3D NAND, DRAM, and Power device manufacturing. Its main applications include shallow trench isolation (STI) etching, gate etching, and spacer etching. It offers rich process-tuning methods, high etching uniformity, and mass-production stability.
◈ Low-damage pulsed plasma control technology.
◈ Precise etching topography control.
◈ Advanced surface treatment and coating technologies.
◈ Stable delivery system and excellent process flow.
Integrated circuit.
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