6/8 Inch General PVD System
Catalog NO.: AIMRSE-NRDE-035 Category: Nanotechnology R&D Equip
6/8 Inch General PVD System is designed for metal film deposition. Built on a cluster tool architecture with vacuum transfer, degas, pre-clean, and configurable process chambers, it is widely used in the 6/8-inch power device field.
◈ The unique heating base design ensures excellent temperature uniformity, enabling continuous operation of high-temperature, thick aluminum processes without temperature buildup.
◈ The high-temperature, thick aluminum process boasts high aspect ratio filling capability.
◈ The back-gold coating process features thin-film transfer and processing, with real-time temperature monitoring and excellent temperature and stress control.
◈ The dual-cavity transfer platform supports up to 10 process modules.
◈ High target utilization, large production capacity, and low operating costs.
6/8-inch power device manufacturing.
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