6/8-Inch Metal Dry Etcher
Catalog NO.: AIMRSE-NRDE-049 Category: Nanotechnology R&D Equip
6/8-Inch Metal Dry Etcher is a multi-chamber cluster tool for fully automated parallel processing, featuring long MTBC and common hardware configuration for Al and W etching to reduce maintenance costs.
◈ High-density ICP plasma source design, high etching rate.
◈ Excellent morphology control capabilities.
◈ Unique mass production mode, outstanding mass production stability, and higher MTBC.
◈ Customized software with rapid update capabilities.
Integrated circuits (ICs), power devices, compound semiconductors, emerging applications.
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