8 Inch General PVD System
Catalog NO.: AIMRSE-NRDE-034 Category: Nanotechnology R&D Equip
8 Inch General PVD System is an 8-inch general-purpose PVD system for metal film deposition. Built on a cluster tool architecture with vacuum transfer, degas, pre-clean, and multiple process chambers, it is suitable for research and development applications.
◈ Capable of processing multiple materials and films, with low damage and high aspect ratio filling capability.
◈ Independent process chambers, supporting up to 6 process modules.
◈ Excellent temperature and particle control capabilities.
◈ Flexible configuration, high throughput, and low operating costs.
Scientific research and development on 8-inch wafers.
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