Dielectric Etcher
Catalog NO.: AIMRSE-NRDE-053 Category: Nanotechnology R&D Equip
Dielectric Etcher is a 12-inch dielectric etcher providing solutions for BEOL AIO processes in logic nodes at G0 and beyond. It features dual-frequency pulsed RF with Top DC for plasma control, 3-zone tunable gas inlet, precise 4-zone ESC temperature control, and a high-temperature chamber for precise hole/feature profile control.
◈ High critical dimension uniformity and high selectivity.
◈ Highly uniform gas distribution and rapid inlet technology.
◈ Precise control over orifice morphology.
Integrated circuit.
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