LED Chip Etcher
Catalog NO.: AIMRSE-NRDE-068 Category: Nanotechnology R&D Equip
LED Chip Etcher is a plasma dry etcher applied to LED red-yellow and blue-green chip etching processes. It features dual reaction chambers, a tray-type, multi-wafer tray-in tray-out fully automatic operation. The equipment is suitable for etching various materials for Mini LED and Micro LED, covering blue-green and red-yellow chip etching processes.
◈ Adjustable plasma source design ensures excellent etching uniformity.
◈ Multi-pallet operation enables high throughput.
◈ Suitable for various material etching processes with a wide process window.
◈ Temperature gradient design provides excellent particle control.
◈ Equipped with an automated transfer system for automation and intelligence.
LED chip manufacturing.
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