Microwave Plasma Surface Treatment System
Catalog NO.: AIMRSE-NRDE-063 Category: Nanotechnology R&D Equip
Microwave Plasma Surface Treatment System is a surface treatment equipment developed based on microwave plasma technology, compatible with 8/12-inch wafers and configurable with up to 3 chambers and 6 processing stations. Based on stable and reliable microwave plasma devices and good dual-station hardware design, it provides excellent performance and compatibility solutions for surface treatment applications in the advanced packaging field.
◈ 8/12-inch compatible, dual-cavity design.
◈ High-density, low-damage plasma design.
◈ Improved WPH and warp compatibility.
◈ Features high etching rate, wide process window, excellent etching uniformity, and droplet corner handling capabilities.
Advanced packaging.
Contact Form
