Multi-Chamber Electron Beam Evaporation Coating System
Catalog NO.: AIMRSE-NRDE-007 Category: Nanotechnology R&D Equip
Multi-Chamber Electron Beam Evaporation Coating System is an advanced system with multiple process modules including ultra-high vacuum evaporation, sample analysis, pre-cleaning, degassing, and oxidation. It features fully automatic PLC+PC control of sample transfer and all process flows, designed for complex device fabrication.
◈ Multi-Chamber Design: Multiple interconnected process modules for complex, multi-step processes without breaking vacuum.
◈ Modules Included: Ultra-high vacuum evaporation, sample analysis, pre-cleaning, degassing, oxidation, and load lock.
◈ Fully Automatic Control: PLC+PC controls sample transfer and all process flow.
Specialized Applications: Designed for Josephson junction preparation, superconducting material film deposition, and quantum device preparation.
Contact Form
