Silicon Etcher
Catalog NO.: AIMRSE-NRDE-059 Category: Nanotechnology R&D Equip
Silicon Etcher is a 12-inch dry etcher for silicon etching. It focuses on mature applications of Logic, CIS, BCD, and Power devices. Main applications include STI etching, gate etching, and sidewall etching, with rich process tuning methods and high uniformity.
◈ Precise control over critical dimensions and topography.
◈ Flexible process uniformity adjustment technology.
◈ Excellent in-situ etching capability for multilayer stacked film structures.
Integrated circuit.
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