Vacuum Coating Complete Solutions

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High‑quality thin films — whether for optical coatings, hard wear layers, or decorative finishes — demand precise vacuum control, repeatable deposition rates, and clean chamber conditions. AIMRSE designs and builds complete vacuum coating systems tailored to your process: physical vapor deposition (PVD), chemical vapor deposition (CVD), magnetron sputtering, thermal evaporation, or e‑beam evaporation. Our turnkey solutions integrate chamber (custom sizes, ports, and fixtures), pumping stack (turbo or diffusion pumps with dry/oil‑sealed backing), gas delivery (MFCs for Ar, O₂, N₂), and automation (PLC/HMI with recipe management). Base pressures range from 10⁻⁶ to 10⁻⁷ mbar, with pump‑down times under 20 minutes. We provide full process validation, operator training, and documentation. Ideal for optical coating, semiconductor barrier layers, tool coating, and R&D thin‑film development. Supported by US‑based service and remote diagnostics.

Consult Our Coating System Engineers

Discuss your substrate size, deposition material, film uniformity requirements, and throughput targets.

Vacuum Coating System Engineering Priorities

Controlled Deposition Environment

Base pressure 10⁻⁶–10⁻⁷ mbar, low residual gas impurities. Turbo or diffusion pumping with cryo-traps for water vapor reduction.

Precise Process Control

Mass flow controllers for gas mixture, programmable power supplies (DC, RF, pulsed DC), and automated substrate rotation for uniformity.

Recipe Management & Data Logging

Store up to 100 recipes with ramp/soak profiles. Log pressure, gas flow, power, and rate for each run. Full audit trail for quality assurance.

Vacuum Coating System Engineering Workflow

From process specification to commissioned system — fully documented and validated.

01
Process & Throughput Analysis

Define substrate size, deposition material, required uniformity, and cycle time.

02
Chamber & Fixture Design

3D CAD of chamber, port locations, substrate holder (planetary/rotary), and source placement.

03
Pumping & Gas Control

Select turbo/diffusion/cryo pump, backing pump, MFCs for process gases, and pressure control.

04
Power Supply & Automation

Install DC/RF/pulsed DC power supplies, PLC/HMI, and recipe management software.

05
Factory Acceptance Test (FAT)

Pump‑down test, deposition test with witness samples, uniformity measurement.

06
On‑Site Installation & Training

SAT, operator training, process optimization, and handover of documentation.

The Advantages of AIMRSE

Custom engineered, process‑optimized, and fully supported.

Custom Chamber & Fixture Design

Any size, shape, or port configuration. Planetary, rotating, or stationary substrate holders for uniform coating.

Multiple Deposition Technologies

Magnetron sputtering (DC, RF, pulsed DC), cathodic arc, thermal/electron‑beam evaporation, and CVD.

Automated Process Control

PLC with touch HMI, recipe storage (up to 100 recipes), data logging, and remote monitoring via OPC UA or Modbus TCP.

Process Development Support

Our engineers help optimize deposition parameters for your specific material and film properties. On‑site commissioning and training included.

Vacuum Coating System Success Stories

Real improvements in film quality, throughput, and repeatability.

±2% Uniformity
Magnetron sputtering Reactive gas control

Optical Coating Production Line

Arizona, USA

An optical coating manufacturer needed a high‑throughput system for anti‑reflective coatings on glass. AIMRSE delivered a 1 m diameter cylindrical chamber with dual magnetron sputtering cathodes (Ti and SiO₂ targets), reactive gas control (Ar/O₂), and planetary substrate rotation. The system achieves ±2% uniformity over 500 mm diameter substrates and processes 50 lenses per batch. Recipe management allows rapid changeover between coating stacks.

0.2 µm Coating Thickness
Arc evaporation TiN/TiAlN

Hard Coating for Cutting Tools

Virginia, USA

A tool manufacturer required a cathodic arc evaporation system for TiN and TiAlN coatings on carbide inserts. AIMRSE supplied a chamber with three arc sources, rotary fixturing for 200 inserts per batch, and a diffusion pumping stack. The system deposits 0.2 µm coatings with hardness >30 GPa. Cycle time is 90 minutes, including pump‑down, etching, deposition, and cooling.

10⁻⁷ Base Pressure (mbar)
Turbo pump RF/DC sputtering

R&D Multi‑target Sputtering System

Oregon, USA

A materials research lab needed a flexible sputtering system for depositing metallic and oxide thin films on up to 4" wafers. AIMRSE built a compact chamber with four 2" magnetron sputtering guns (two DC, two RF), a turbo‑molecular pump (base pressure 2×10⁻⁷ mbar), and a touchscreen controller with recipe storage. The system supports co‑sputtering and reactive sputtering with MFCs for Ar, O₂, and N₂.

Customer Reviews

Real feedback from coating engineers and lab managers.

KP

K**ath P.

★★★★★
"We have put AIMRSE’s optical coating sputtering system into use for six months, and it has run 500 batches with zero downtime. The coating uniformity stays within ±2% over the whole substrate holder, and the recipe management function helps us switch between different coating stacks quickly. Their technical team also optimized the reactive gas control for SiO₂ coatings, making the whole production process fully automated."
SK

S**ph K.

★★★★★
"AIMRSE’s cathodic arc evaporation system perfectly meets our cutting tool coating demands. It can deposit 0.2 µm TiN/TiAlN coatings with hardness over 30 GPa on carbide inserts, and the whole cycle only takes 90 minutes including pump-down, etching, deposition and cooling. The diffusion pumping stack ensures stable and efficient vacuum environment for our mass production."
GT

G**ri T.

★★★★★
"The multi-target sputtering system from AIMRSE is extremely suitable for our materials R&D lab. It reaches a base pressure of 2×10⁻⁷ mbar with a turbo-molecular pump, and supports both co-sputtering and reactive sputtering smoothly. The touchscreen HMI with recipe storage and remote diagnostics function brings great convenience to our thin-film deposition research work."

Technical FAQ

What is the typical base pressure and pump‑down time for a coating system?
Our standard coating systems achieve base pressure of 5×10⁻⁷ mbar within 30 minutes from atmosphere, using a turbo‑molecular pump backed by a dry scroll or oil‑sealed rotary vane pump. For larger chambers (e.g., 1 m diameter), we use diffusion pumps or cryo‑pumps to achieve 10⁻⁷ mbar in 60 minutes. For UHV coating (e.g., MBE or sputtering with reactive gases), we offer turbo‑pumped systems with 10⁻⁹ mbar base pressure. Pump‑down time depends on chamber volume and outgassing; we provide simulated curves during design.
What deposition technologies do you offer for coating systems?
We offer four primary technologies: (1) Magnetron sputtering (DC for metals, RF for insulators, pulsed DC for reactive sputtering). (2) Cathodic arc evaporation for hard coatings (TiN, CrN, TiAlN). (3) Thermal evaporation using resistance‑heated boats or crucibles. (4) Electron‑beam evaporation for high‑melting‑point materials. We can also integrate multiple sources in one chamber (e.g., sputtering and e‑beam) for multi‑layer coatings. Please specify your material and desired deposition rate.
Can you integrate substrate heating and bias voltage?
Yes. Substrate heating is available up to 800°C using radiative heaters with PID control. Bias voltage (DC or pulsed DC) can be applied to the substrate for ion cleaning and densification of the film — typically 50–300 V negative bias. We also offer plasma etching using RF or DC glow discharge before deposition. All parameters are programmable within the recipe.
Do you provide validation and documentation for regulated industries (aerospace, medical)?
Absolutely. We provide full IQ/OQ protocols, material certificates, surface finish reports, and helium leak test certificates. For medical device coating (e.g., stents, orthopedic implants), we can qualify the system to ISO 13485 and 21 CFR Part 11 with electronic signatures and audit trail. For aerospace coatings, we provide traceability to AMS or customer specifications. We also offer on‑site SAT and operator training.

Featured Solutions

Note: Our vacuum equipment is for research and industrial testing only. Industrial-grade components are fully rated for field deployment.

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