Vacuum Flange & Fitting

Q: What is the primary factor when choosing between 304 and 316LN stainless steel for flanges?

304 is standard for high vacuum, while 316LN is preferred for UHV/XHV and cryogenics due to its low magnetic permeability and lower hydrogen outgassing rate. 316LN also resists intergranular corrosion better during repetitive bakeouts.

Q: Can ConFlat (CF) gaskets be reused, and what material is best for UHV?

OFHC copper gaskets are single-use because they rely on plastic deformation. High-purity, fully annealed copper is best for UHV. For corrosive or cryogenic environments, silver-plated copper or nickel gaskets are recommended.

Q: How does the surface finish of a fitting affect the pump-down time of a system?

Pump-down speed is limited by desorption. Rough surfaces have more area for gas molecules to stick to. Electropolishing to Ra < 0.25 μm minimizes this area and removes dead zones, significantly accelerating the transition to the molecular flow regime.

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Cat	Products Name	Key Features
VPC-VFF-091	Flange & Fitting ISO 250 Blank Aluminum ClampStyle	6061-T6 Aluminum; Clamp Style; Blank Plate
VPC-VFF-092	Flange & Fitting ISO 250 Blank Stainless ClampStyle	304L Stainless; Clamp Style; Blank Plate
VPC-VFF-093	Flange & Fitting ISO 250 Bored Stainless ClampStyle	304L Stainless; Clamp Style; 9.88in Bore
VPC-VFF-094	Flange & Fitting ISO 320 Blank Aluminum ClampStyle	6061-T6 Aluminum; Clamp Style; Blank Plate
VPC-VFF-095	Flange & Fitting ISO 320 Blank Aluminum BoltStyle	6061-T6 Aluminum; Bolt Style; Blank Plate
VPC-VFF-096	Flange & Fitting ISO 320 Blank Stainless BoltStyle	304L Stainless; Bolt Style; Blank Plate
VPC-VFF-097	Flange & Fitting ISO 320 Blank Stainless ClampStyle	304L Stainless; Clamp Style; Blank Plate
VPC-VFF-098	Flange & Fitting ISO 320 Bored Stainless ClampStyle	304L Stainless; Clamp Style; 12.52in Bore
VPC-VFF-099	Flange & Fitting ISO 80 Bored Stainless ClampStyle	304L Stainless; Clamp Style; 2.94in Bore
VPC-VFF-100	Flange & Fitting ISO 80 Blank Stainless BoltStyle	304L Stainless; Bolt Style; Blank Plate

Precision Vacuum Flanges, Fittings & Interconnects

The modular integrity of a vacuum system is defined by the reliability of its interconnecting hardware. AIMRSE provides a comprehensive portfolio of high-precision flanges and fittings, engineered to serve as the standardized backbone for Ultra-High Vacuum (UHV) and Extremely High Vacuum (XHV) environments. Our hardware is fabricated from premium-grade 304, 316L, and 316LN stainless steel, undergoing rigorous electropolishing and ultrasonic cleaning protocols to ensure the lowest possible outgassing rates.

Covering the full spectrum of industrial standards—including KF (NW), ISO-K/F, and ConFlat (CF)—AIMRSE components are designed for absolute geometric repeatability. By focusing on metallurgical purity and precision CNC machining, we provide the essential building blocks for semiconductor process tools, cryogenic systems, and high-energy physics beamlines. Every component is helium-leak-verified to ensure that your system maintains its target base pressure under the most demanding operational duty cycles.

Standardize Your System Architecture

Consult with our mechanical engineers to select the optimal flange standards and material grades for your process gas compatibility.

Global technical support available within 24 hours.

Sealing Physics & Metallurgical Engineering

Knife-Edge Metal-to-Metal Sealing (CF)

For UHV/XHV regimes, AIMRSE ConFlat (CF) flanges utilize the "captured gasket" principle. A precision-machined stainless steel knife-edge deforms a soft OFHC (Oxygen-Free High-Conductivity) copper gasket, inducing plastic flow into the flange grooves. This creates a diffusion-proof, metal-to-metal barrier capable of sustaining pressures down to $10^{-11}$ Pa and surviving repetitive thermal cycling up to $450^{\circ}$C.

Elastomeric Compression Dynamics (KF/ISO)

Our KF (NW) and ISO-standard hardware utilize centering rings with high-performance fluorocarbon (Viton/FKM) O-rings. Precision-engineered clamps and bolts provide the axial force necessary to achieve a hermetic seal in the rough-to-high vacuum range ($10^{-6}$ Pa). The O-ring groove geometry is optimized to prevent seal "pumping" and to minimize the exposed surface area of the elastomer, thereby reducing gas permeation rates.

Surface Metrology & Outgassing Control

The internal surface morphology of fittings is a critical factor in evacuation time. AIMRSE hardware undergoes advanced electropolishing to achieve a surface roughness of $R_a < 0.25$ μm. This reduces the effective surface area for water vapor adsorption and removes microscopic contaminants. For XHV applications, we provide vacuum-fired components that have been depleted of dissolved hydrogen, further mitigating the intrinsic outgassing rate of the stainless steel bulk.

The Advantages of AIMRSE

Standardized precision for high-reliability vacuum interconnectivity.

Standardized Interoperability

Full compliance with ISO 2861 (KF), ISO 1609 (ISO), and ISO 3669 (CF) ensures seamless integration with global vacuum toolsets.

UHV Material Purity

Utilizes high-grade 316L/316LN stainless steel with low inclusion limits to prevent hydrogen permeation and virtual leaks.

Thermal Stability

CF hardware is bakeable up to $450^{\circ}$C, essential for achieving the extremely low base pressures required in surface science and XHV research.

Leak-Verified Integrity

100% of critical fittings undergo helium mass spectrometer testing with sensitivity thresholds as low as $1 \times 10^{-10}$ mbar·l/s.

Standards & Metallurgical Compliance

The mechanical and metrological integrity of AIMRSE vacuum flanges and fittings is strictly governed by authoritative global industrial standards. All ConFlat (CF) hardware complies with ISO 3669, while KF and ISO-standard interfaces are manufactured in full accordance with ISO 2861 and ISO 1609. Every batch is verified for material composition and traceability to NIST-linked benchmarks. Our manufacturing workflows are fully audited under the ISO 9001:2015 framework. Furthermore, our UHV-grade components meet the cleanliness requirements of SEMI E49, guaranteeing uncompromised performance for semiconductor, aerospace, and high-purity laboratory applications.

Technical FAQ

What is the primary factor when choosing between 304 and 316LN stainless steel for flanges?

304 stainless steel is the standard for high vacuum applications ($10^{-6}$ Pa). However, for UHV/XHV or cryogenic systems, 316LN (Low-carbon, Nitrogen-enhanced) is preferred. It offers superior magnetic permeability (stays non-magnetic even after machining/welding) and has a lower hydrogen outgassing rate. 316LN also provides improved resistance to intergranular corrosion during repetitive high-temperature bakeouts.

Can ConFlat (CF) gaskets be reused, and what material is best for UHV?

OFHC copper gaskets are the standard for CF flanges and are strictly for single-use, as they rely on plastic deformation to create the seal. For UHV applications, high-purity, fully annealed copper is required to ensure the knife-edge can bite effectively without excessive torque. For cryogenic or corrosive processes, silver-plated copper or specialized nickel gaskets may be utilized to prevent atmospheric oxidation at high bakeout temperatures.

How does the surface finish of a fitting affect the pump-down time of a system?

Pump-down time in high vacuum is limited by the rate of gas desorption from the internal walls. A rough surface has a much higher "effective" surface area for water vapor and hydrocarbons to cling to. By electropolishing AIMRSE fittings to $R_a < 0.25$ μm, we minimize this surface area and remove the "dead zones" where molecules hide, significantly accelerating the transition from viscous flow to the molecular flow regime.

Related Products

Note: Our vacuum equipment is for research and industrial testing only. Industrial-grade components are fully rated for field deployment.

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