Vacuum Gauge Tube

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Cat Products Name Key Features Price
VMC-VGT-021 ZJ-52T-ZJ-14-2Ch-Controller 2 Channels; Semiconductor Ready; MODBUS-RTU
VMC-VGT-022 ZJ-52T-ZJ-14-3Ch-Controller 3 Channels; Multi-point Control; RS-485

Vacuum Gauge Transducers & Sensor Technology

Precision vacuum metrology is the fundamental prerequisite for process stability in the sub-Pascal regime. AIMRSE vacuum gauge tubes are engineered to quantify total pressure with absolute repeatability across a dynamic range spanning 13 decades. By leveraging diverse physical principles—from Pirani-based thermal conductivity to Bayard-Alpert ionization—these transducers provide the high-fidelity signal required for Ultra-High Vacuum (UHV) and Extremely High Vacuum (XHV) environments.

Our sensor architecture prioritizes metallurgical purity and geometric precision. Utilizing yttria-coated iridium filaments and low-permeability ceramic-to-metal feedthroughs, our gauge tubes minimize parasitic outgassing and thermal drift. This ensures that the measured ion current or heat loss is a direct, linear function of the gas density within the chamber, yielding unimpeachable data for semiconductor fabrication and particle physics research.

Consult Our Engineering Team

Discuss your specific sensitivity requirements and system throughput constraints with our senior vacuum specialists.

Transduction Physics & Analytical Capabilities

Thermal Conductivity (Pirani) Mechanics

In the medium-to-fine vacuum regime, gas density dictates the rate of heat dissipation from a heated filament. Our Pirani gauges utilize a gold-plated tungsten-rhenium wire within a balanced bridge circuit. As pressure fluctuates, the resulting change in thermal conductivity alters the wire's resistance. This infinitesimal variance is linearized via advanced electronics to provide accurate quantification from atmosphere down to $10^{-2}$ Pa.

Ionization Current Quantification

For UHV regimes below $10^{-3}$ Pa, we employ Bayard-Alpert hot cathode ionization physics. Electrons emitted from a yttria-coated filament ionize residual gas molecules within a grid structure. The resulting positive ions are attracted to a central collector wire, generating a picoampere-scale current. This ion current is directly proportional to the gas density, allowing for precision metrology down to the XHV limit of $10^{-10}$ Pa.

Low-Permeability UHV Materials

To prevent measurement artifacts caused by outgassing, AIMRSE gauge tubes utilize 316LN stainless steel and high-purity alumina ceramics. All internal components undergo vacuum-firing at $1000^{\circ}$C to deplete dissolved hydrogen. This material integrity ensures that the sensor does not introduce its own gas load, which is critical for maintaining the accuracy of XHV baseline measurements.

The Advantages of AIMRSE

Precision-engineered for uncompromised data fidelity and sensor longevity.

Broad-Spectrum Accuracy

Provides continuous, high-resolution pressure data across 13 decades ($10^{-10}$ Pa to $10^{5}$ Pa) with integrated crossover logic.

Filament Longevity

Utilizing proprietary yttria-coated iridium filaments that offer superior resistance to oxidation and chemical poisoning.

Low Signal Noise

Optimized electrode geometries and high-gain electrometer circuits deliver extraordinary signal-to-noise ratios in the XHV range.

UHV System Handshake

Compatible with standard CF/KF flanges and bakeable up to $450^{\circ}$C for seamless integration into high-performance vacuum systems.

Standards & Metrology Compliance

The metrological integrity of AIMRSE vacuum gauge tubes is governed by authoritative international vacuum technology standards. Calibration protocols are strictly executed in accordance with ISO 3530 (Vacuum technology — Calibration of low-pressure gauges) and ISO 19685. Every sensor is verified against NIST Traceable benchmarks to ensure absolute pressure quantification fidelity. Furthermore, our transducers meet the electromagnetic compatibility requirements of EN 61326-1 and comply with CE & RoHS directives for laboratory and industrial safety.

ISO 3530 ISO 19685 NIST Traceable EN 61326-1 UHV Bakeable CE & RoHS Compliant

Technical FAQ

Why are vacuum gauge readings dependent on the gas species being measured?
Most vacuum sensors (Pirani and Ionization) measure pressure indirectly by utilizing gas properties like thermal conductivity or ionization probability. Since different gas molecules have varying masses and cross-sections, a Pirani gauge calibrated for Nitrogen will read differently for Helium or Argon. AIMRSE transmitters include gas-specific correction factors to ensure accurate quantification across diverse gas species.
What determines the lifespan of a hot cathode ionization gauge filament?
Filament life is primarily governed by the operating pressure and the chemical nature of the residual gas. High-pressure operation (above $10^{-1}$ Pa) or the presence of corrosive halogens can lead to rapid oxidation or poisoning. Our yttria-coated iridium filaments are designed to survive accidental atmospheric exposure while at temperature, significantly extending the service life compared to pure tungsten filaments.
How does the crossover logic work in wide-range combination gauges?
Combination gauges utilize a Pirani sensor for the rough-to-fine vacuum regime and automatically trigger the Ionization sensor as the pressure drops below $10^{-2}$ Pa. AIMRSE controllers employ a hysteresis-based switching algorithm that prevents signal oscillation during the transition, ensuring a seamless and stable pressure output across the entire measurement range.

Related Products

Note: Our vacuum equipment is for research and industrial testing only. Industrial-grade components are fully rated for field deployment.

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