Vacuum Valve CF-ISO-F-Electric-DN63
Stable Performance
UHV Compatible
DN63 Compact Footprint
Category: Vacuum Valve
Catalog NO: VPC-VV-007
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Technical Specifications
| Inlet Flange | CF/ISO-F |
| Pressure Range | 10^5-10^-6 Pa |
| Nominal Diameter | DN63mm |
| Leak Rate | ≤1.3×10^-10 Pa·m³/s |
| Actuation Method | Electric |
| Operating Voltage | 20V≤AC≤50V |
| Valve Position Indication | PNP Photoelectric Switch |
| Bake-out Temperature | On: 150°C; Off: 120°C |
| Mounting Orientation | Horizontal or motor facing upward |
