Dry Vacuum Pump

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Cat Products Name Key Features Price
VGE-DVP-011 Dry Vacuum Pump-1200M3H 1200m³/h capacity; <0.5Pa; 9.4kW
VGE-DVP-012 Dry Vacuum Pump-300M3H-WC 300m³/h pumping; <5Pa vacuum; Water-cooled
VGE-DVP-013 Dry Vacuum Pump-7M3H 7m³/h flow; 5Pa vacuum; NW25 ports
VGE-DVP-014 Dry Vacuum Pump-11M3H 11m³/h pumping; 3Pa vacuum; Compact design
VGE-DVP-015 Dry Vacuum Pump-22M3H 22m³/h capacity; 10Pa vacuum; NW25
VGE-DVP-016 Dry Vacuum Pump-14M3H 14m³/h pumping; 3Pa vacuum; Multi-voltage
VGE-DVP-017 Dry Vacuum Pump-28M3H 28m³/h flow; 3Pa vacuum; NW40 inlet
VGE-DVP-018 Dry Vacuum Pump-57M3H 57m³/h pumping; 1Pa vacuum; NW40 ports
VGE-DVP-019 Dry Vacuum Pump-115M3H 115m³/h capacity; ≤0.6Pa; 61dB
VGE-DVP-020 Dry Vacuum Pump-560M3H 560m³/h high-flow; ≤0.1Pa; ISO-F-80

Advanced Dry Pumping & Hydrocarbon-Free Generation

In high-precision analytical and fabrication cycles, the presence of even trace lubricants in the swept volume can lead to catastrophic process failure. AIMRSE dry vacuum pumps are engineered to deliver robust kinetic gas evacuation without the use of sealing or lubricating fluids in the compression stages. This architecture eliminates the threat of hydrocarbon back-diffusion, ensuring the absolute dielectric integrity of semiconductor wafers and the purity of mass spectrometry ion paths.

Our dry pumping systems—primarily centered on high-efficiency scroll and multi-stage dry architectures—are designed to provide constant pumping speeds from atmospheric pressure down to the medium-vacuum regime. By leveraging advanced thermal management and precision-machined orbital geometries, AIMRSE provides the reliable, maintenance-lite backing required for turbo-molecular systems and cleanroom-isolated laboratory stations.

Consult Our Pumping Specialists

Evaluate your gas-load requirements and cleanroom compliance needs with our senior fluid dynamics team.

Kinetic Architecture & Compression Physics

Orbital Scroll Compression

Utilizing nested involute spiral geometries, our dry scroll pumps create a sequence of crescent-shaped gas pockets that diminish in volume during orbital motion. This continuous compression cycle drives gas from the peripheral inlet to the central exhaust without the need for valves or lubricants, facilitating a smooth, pulse-free flow that is ideal for sensitive analytical vibration-isolation mounts.

Advanced Vapor Load Management

Condensable vapors can degrade ultimate pressure and cause internal corrosion. AIMRSE dry pumps integrate a multi-stage gas ballast system that introduces a controlled flow of dry nitrogen into the final compression stage. This reduces the partial pressure of condensables below their saturation point, allowing water vapor and solvent traces to be exhausted in the gaseous phase, preserving pump longevity.

Hermetic Integrity & Tip Seal Technology

The boundary between atmospheric pressure and vacuum is maintained via proprietary PTFE-composite tip seals. These seals are precision-tensioned to compensate for wear while providing a low-friction interface with the scroll flanks. Combined with double-shielded, grease-isolated bearings, our pumps ensure zero-leakage performance and prevent any particulate generation from entering the primary vacuum stream.

The Advantages of AIMRSE

Eliminating contamination risk through oil-free kinetic innovation.

Hydrocarbon-Free Path

Absolute elimination of oil back-streaming, protecting delicate samples and UHV chambers from organic contamination.

Low Acoustic Footprint

Optimized orbital balancing and sound-dampening enclosures ensure a quiet laboratory environment below 52 dB(A).

Minimal Maintenance

No oil changes or filtration disposal required. Long-life tip seals extend standard service intervals up to 2 years.

Cleanroom Ready

Oil-free construction and hermetic sealing prevent particulate outgassing, meeting ISO Class 4 cleanliness standards.

Standards & Metrology Compliance

The performance characteristics of AIMRSE dry vacuum pumps are strictly verified against international vacuum technology benchmarks. Pumping speed and ultimate pressure quantifications are executed in full accordance with ISO 21360-1 (Vacuum pumps — Standard methods for measuring performance-characteristics). Equipment safety and environmental integration comply with the CE Machinery Directive and UL/CSA electrical protocols. Furthermore, our pumps are manufactured within an ISO 9001:2015 framework, ensuring every unit meets the stringent cleanliness requirements for the REACH & RoHS directives, guaranteeing zero hazardous substances in the vacuum path.

ISO 21360-1 ISO 9001:2015 CE Machinery Directive UL 61010-1 RoHS/REACH Compliant ISO Class 4 Cleanroom

Technical FAQ

What is the maintenance interval for the tip seals in an AIMRSE dry scroll pump?
Under standard laboratory conditions pumping clean, dry air, the PTFE-based tip seals typically require replacement every 8,000 to 10,000 operational hours (approximately 1.5 to 2 years of continuous use). Operating with high vapor loads or in corrosive environments may reduce this interval; however, our integrated gas ballast system helps mitigate this by preventing condensable accumulation.
Can these dry pumps be used to back turbo-molecular pumps in Ultra-High Vacuum (UHV) systems?
Absolutely. Dry scroll pumps are the preferred choice for backing turbo-molecular systems because they provide a hydrocarbon-free foreline. This prevents oil back-streaming from contaminating the high-vacuum stage, allowing the turbo pump to reach its ultimate UHV base pressure (down to $10^{-8}$ Pa) with significantly higher process purity.
Are dry vacuum pumps compatible with pumping condensable solvent vapors or water vapor?
Yes, provided the gas ballast is utilized. By introducing a small amount of dry gas into the compression chamber, the pump prevents the vapor from reaching its dew point during the compression stroke. For high-concentration solvent applications, we recommend the addition of a cold trap at the inlet to protect the pump internal geometries and extend seal life.

Related Products

Note: Our vacuum equipment is for research and industrial testing only. Industrial-grade components are fully rated for field deployment.

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