Dry Vacuum Pump

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Cat Products Name Key Features Price
VGE-DVP-021 Dry Vacuum Pump-980M3H 980m³/h pumping; ≤0.1Pa; 64dB
VGE-DVP-022 Dry Vacuum Pump-120M3H 120m³/h capacity; ≤0.6Pa; KF50 inlet
VGE-DVP-023 Dry Vacuum Pump-380M3H 380m³/h pumping; ≤0.1Pa; ISO-F-50
VGE-DVP-024 Dry Vacuum Pump-600M3H 600m³/h flow; ≤0.1Pa; 62dB
VGE-DVP-025 Dry Vacuum Pump-1000M3H 1000m³/h ultra-high; ≤0.1Pa; ISO-F-100
VGE-DVP-026 Dry Vacuum Pump-250LPM 250L/min pumping; 1.6Pa; 400W
VGE-DVP-027 Dry Vacuum Pump-300LPM 300L/min flow; 1.6Pa vacuum; KF ports
VGE-DVP-028 Dry Vacuum Pump-90LPM 90L/min compact; 5Pa vacuum; ≤52dB
VGE-DVP-029 Dry Vacuum Pump-108LPM 108L/min pumping; 5Pa; 150W power
VGE-DVP-030 Dry Vacuum Pump-500LPM 500L/min capacity; 1Pa vacuum; Dual-phase

Advanced Dry Pumping & Hydrocarbon-Free Generation

In high-precision analytical and fabrication cycles, the presence of even trace lubricants in the swept volume can lead to catastrophic process failure. AIMRSE dry vacuum pumps are engineered to deliver robust kinetic gas evacuation without the use of sealing or lubricating fluids in the compression stages. This architecture eliminates the threat of hydrocarbon back-diffusion, ensuring the absolute dielectric integrity of semiconductor wafers and the purity of mass spectrometry ion paths.

Our dry pumping systems—primarily centered on high-efficiency scroll and multi-stage dry architectures—are designed to provide constant pumping speeds from atmospheric pressure down to the medium-vacuum regime. By leveraging advanced thermal management and precision-machined orbital geometries, AIMRSE provides the reliable, maintenance-lite backing required for turbo-molecular systems and cleanroom-isolated laboratory stations.

Consult Our Pumping Specialists

Evaluate your gas-load requirements and cleanroom compliance needs with our senior fluid dynamics team.

Kinetic Architecture & Compression Physics

Orbital Scroll Compression

Utilizing nested involute spiral geometries, our dry scroll pumps create a sequence of crescent-shaped gas pockets that diminish in volume during orbital motion. This continuous compression cycle drives gas from the peripheral inlet to the central exhaust without the need for valves or lubricants, facilitating a smooth, pulse-free flow that is ideal for sensitive analytical vibration-isolation mounts.

Advanced Vapor Load Management

Condensable vapors can degrade ultimate pressure and cause internal corrosion. AIMRSE dry pumps integrate a multi-stage gas ballast system that introduces a controlled flow of dry nitrogen into the final compression stage. This reduces the partial pressure of condensables below their saturation point, allowing water vapor and solvent traces to be exhausted in the gaseous phase, preserving pump longevity.

Hermetic Integrity & Tip Seal Technology

The boundary between atmospheric pressure and vacuum is maintained via proprietary PTFE-composite tip seals. These seals are precision-tensioned to compensate for wear while providing a low-friction interface with the scroll flanks. Combined with double-shielded, grease-isolated bearings, our pumps ensure zero-leakage performance and prevent any particulate generation from entering the primary vacuum stream.

The Advantages of AIMRSE

Eliminating contamination risk through oil-free kinetic innovation.

Hydrocarbon-Free Path

Absolute elimination of oil back-streaming, protecting delicate samples and UHV chambers from organic contamination.

Low Acoustic Footprint

Optimized orbital balancing and sound-dampening enclosures ensure a quiet laboratory environment below 52 dB(A).

Minimal Maintenance

No oil changes or filtration disposal required. Long-life tip seals extend standard service intervals up to 2 years.

Cleanroom Ready

Oil-free construction and hermetic sealing prevent particulate outgassing, meeting ISO Class 4 cleanliness standards.

Standards & Metrology Compliance

The performance characteristics of AIMRSE dry vacuum pumps are strictly verified against international vacuum technology benchmarks. Pumping speed and ultimate pressure quantifications are executed in full accordance with ISO 21360-1 (Vacuum pumps — Standard methods for measuring performance-characteristics). Equipment safety and environmental integration comply with the CE Machinery Directive and UL/CSA electrical protocols. Furthermore, our pumps are manufactured within an ISO 9001:2015 framework, ensuring every unit meets the stringent cleanliness requirements for the REACH & RoHS directives, guaranteeing zero hazardous substances in the vacuum path.

ISO 21360-1 ISO 9001:2015 CE Machinery Directive UL 61010-1 RoHS/REACH Compliant ISO Class 4 Cleanroom

Technical FAQ

What is the maintenance interval for the tip seals in an AIMRSE dry scroll pump?
Under standard laboratory conditions pumping clean, dry air, the PTFE-based tip seals typically require replacement every 8,000 to 10,000 operational hours (approximately 1.5 to 2 years of continuous use). Operating with high vapor loads or in corrosive environments may reduce this interval; however, our integrated gas ballast system helps mitigate this by preventing condensable accumulation.
Can these dry pumps be used to back turbo-molecular pumps in Ultra-High Vacuum (UHV) systems?
Absolutely. Dry scroll pumps are the preferred choice for backing turbo-molecular systems because they provide a hydrocarbon-free foreline. This prevents oil back-streaming from contaminating the high-vacuum stage, allowing the turbo pump to reach its ultimate UHV base pressure (down to $10^{-8}$ Pa) with significantly higher process purity.
Are dry vacuum pumps compatible with pumping condensable solvent vapors or water vapor?
Yes, provided the gas ballast is utilized. By introducing a small amount of dry gas into the compression chamber, the pump prevents the vapor from reaching its dew point during the compression stroke. For high-concentration solvent applications, we recommend the addition of a cold trap at the inlet to protect the pump internal geometries and extend seal life.

Related Products

Note: Our vacuum equipment is for research and industrial testing only. Industrial-grade components are fully rated for field deployment.

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