Turbomolecular Pump 1500Ls-21000RPM-400W
Fast pumping
Low power
Durable build
Category: Turbomolecular Pump
Catalog NO: VGE-TP-005
X
Technical Specifications
| Start-up Time | ≤8 min |
| Weight | 60 kg(LF);63 kg(CF) |
| Main Unit Power / Voltage | DC24/AC220 (V AC) |
| Inlet Flange | DN250 CF DN250 ISO-K |
| Power Consumption | ≤750 W |
| Ultimate Pressure | CF: 6E-7 Pa;ISO-K: 6E-6 Pa |
| Pumping Speed | N₂: 1500 L/s;He: 1100 L/s;H₂: 550 L/s;Ar: 1350 L/s |
| Motor Speed | 21000 RPM |
| Exhaust Flange | DN50 |
| Cooling Method | Water-cooled |
| Recommended Forepump | 15 L/s |
| Cooling Water Flow Rate | ≥1 L/min |
| Max. Foreline Pressure | N₂: 450 Pa |
| Cooling Water Temperature | ≤25°C |
| Compression Ratio | N₂: 1E8 He: 1E4 H₂: 5E3 Ar: 1E8 |
| Max. Continuous Foreline Pressure | 300 Pa |
| Max. Gas Load | N₂: 2400 sccm;He: 1800 sccm;H₂: 1400 sccm;Ar: 900 sccm |
| Compatible Power Supply Model | FD-II; FD-IIB; TCDP-II; TD-II |
