Turbomolecular Pump 600Ls-27000RPM-200W
Lightweight design
High efficiency
Easy installation
Category: Turbomolecular Pump
Catalog NO: VGE-TP-007
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Technical Specifications
| Start-up Time | ≤7 min |
| Weight | 29 kg(LF);30.5 kg(CF) |
| Main Unit Power / Voltage | DC24/AC220 (V AC) |
| Inlet Flange | DN160 CF DN160 ISO-K |
| Power Consumption | ≤500 W |
| Ultimate Pressure | CF: 6E-7 Pa;ISO-K: 6E-6 Pa |
| Pumping Speed | N₂: 600 L/s;He: 380 L/s;H₂: 240 L/s;Ar: 580 L/s |
| Motor Speed | 27000 RPM |
| Exhaust Flange | DN40 |
| Cooling Method | Water-cooled |
| Recommended Forepump | 4–8 L/s |
| Cooling Water Flow Rate | ≥1 L/min |
| Max. Foreline Pressure | N₂: 350 Pa |
| Cooling Water Temperature | ≤25°C |
| Compression Ratio | N₂: 1E9 He: 1E4 H₂: 6E3 Ar: 1E9 |
| Max. Continuous Foreline Pressure | 240 Pa |
| Max. Gas Load | N₂: 1200 sccm;He: 880 sccm;H₂: 700 sccm;Ar: 450 sccm |
| Compatible Power Supply Model | TCDP-II; FD-IIB; TD-II/TCP-II |
