Turbomolecular Pump 5000Ls-21000RPM-1500W
High pumping speed
Industrial grade
Low vibration
Category: Turbomolecular Pump
Catalog NO: VGE-TP-001
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Technical Specifications
| Start-up Time | ≤15 min |
| Weight | 98 kg (separate); 110 kg (integrated) |
| Main Unit Power / Voltage | DC24/AC220 (V AC) |
| Inlet Flange | DN400 ISO-F |
| Power Consumption | ≤1100 W |
| Ultimate Pressure | 1E-7 Pa |
| Pumping Speed | N₂: 5000 L/s;He: 3550 L/s;H₂: 2500 L/s;Ar: 4500 L/s |
| Motor Speed | 21000 RPM |
| Exhaust Flange | DN40 |
| Cooling Method | Water-cooled |
| Recommended Forepump | 30 L/s |
| Cooling Water Flow Rate | ≥1 L/min |
| Max. Foreline Pressure | N₂: 300 Pa |
| Cooling Water Temperature | ≤25°C |
| Compression Ratio | N₂: 1E8 He: 1E4 H₂: 1E3 Ar: 1E8 |
| Max. Continuous Foreline Pressure | 100 Pa |
| Max. Gas Load | N₂: 5500 sccm;He: 4000 sccm;H₂: 3200 sccm;Ar: 2100 sccm |
| Compatible Power Supply Model | CDP-IV |
