12-inch Large Comprehensive Probe Station T-300
Catalog NO.: AIMRSE-PS-S-8
Designed for I/V curve testing, C/V testing, and RF S-parameter measurements of 1-12 inch wafers, batch devices, single chips, and MEMS. Offers high stability and ease of use with optional Air Bearing Stage technology for enhanced functionality. Ideal for laboratory chip verification, failure analysis, and production line RF chip S-parameter testing. Compatible with source meters, semiconductor parameter analyzers, LCR meters, and network analyzers.
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| Product Highlights | 12-inch large wafer test |
| Chuck Size | 12 inches (305mm) multifunctional chuck with independent calibration position and single chip test position standard |
| Temperature Range | Ambient standard; Optional: -100°C/200°C/300°C/400°C |
| Microscope / Optics | Monocular microscope standard (30X~150X); Stereo optional (8X~50X); Metallurgical optional (50X~1000X); Focus range: 0-30mm; LED light standard, Coaxial/Cold light optional |
| Manipulator / Probe | MP-150 probe holders standard (MP-180/200 optional); 2 probe positions standard (2-8 optional); Probe precision: ±0.7μm standard (±0.5/0.35μm optional) |
| Positioning Precision | ±0.7μm standard |
| Imaging System | HD 1080P industrial camera standard (photo/video/measurement) |
| Fixture Type | Coaxial probe fixture standard; RF probe arm optional; Imported triaxial probe fixture optional; BNC connector standard |
| Weight | Approx. 80-110KG |
| Dimensions | 810×770×650mm |
| RF Frequency Support | SMA/3.5mm/2.92mm/2.4mm/1.0mm/Triaxial/Banana plug optional; DC~1MHz/100MHz/1GHz/40GHz/50GHz/67GHz/110GHz optional |
| Chuck X/Y Travel | 12"×12" (305×305mm) standard |
| Features | Air Bearing Stage technology optional; Fine lead screw displacement + rapid displacement (Air Bearing Stage) optional; One-lever needle lift function optional (100/200/300μm); Chuck self-locking function optional (locks X/Y axes during probing); Stage elevation 0-40mm standard; Vacuum adsorption with 7 independent valves; Chuck rotation fine adjustable; Chuck Z-lift: 0-10mm |
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