Micro-Positioners

Q: What is the difference between standard and ultra-fine resolution positioners?

Standard positioners offer 0.5 µm resolution; ultra-fine positioners use crossed-roller bearings for 0.1 µm resolution.

Q: Can I use these positioners on a non-AIMRSE probe station?

Yes, magnetic, vacuum, and bolt-down bases are compatible with most commercial platens. Custom adapters available.

Q: What type of probe holder interface is provided?

Universal probe arm mount accepts AIMRSE and industry-standard holders; adapters for RF probe bodies available.

Q: Are vacuum-compatible positioners truly UHV rated?

Yes, rated to 1×10⁻⁹ mbar and bakeable to 150°C with low-outgassing materials and dry lubricants.

Q: How do I maintain and clean my positioners?

Keep slides debris-free and apply supplied lubricant annually. Contact us for vacuum positioner maintenance.

Request a Quote

Cat	Products Name	Product Highlights	Price
AIMRSE-PC-M-1	Lead Screw DC Probe Positioner	Stable DC micro-positioner	Request a Quote
AIMRSE-PC-M-2	Differential Micrometer DC Probe Positioner	High-precision positioner	Request a Quote
AIMRSE-PC-M-3	Economical DC Probe Positioner	Economical probe positioner	Request a Quote
AIMRSE-PC-M-4	Lead Screw RF Probe Positioner	RF-level adjustment stage	Request a Quote
AIMRSE-PC-M-5	Differential Micrometer RF Probe Positioner	High-precision RF positioner	Request a Quote
AIMRSE-PC-M-6	Economical RF Probe Positioner	Economical RF positioner	Request a Quote
AIMRSE-PC-M-7	MP-150 Probe Positioner	Precision DC positioning	Request a Quote
AIMRSE-PC-M-8	MP-180 Probe Positioner	Anti-backlash positioning	Request a Quote
AIMRSE-PC-M-9	MP-200 Probe Positioner	Ultra-precise positioning	Request a Quote
AIMRSE-PC-M-10	MP-150L Probe Positioner	Compact L-type positioner	Request a Quote

Overview

Sub‑Micron Precision for Critical Probe Placement: The accuracy of any electrical measurement begins with the stability and resolution of the probe positioner. At AIMRSE, we manufacture Micro‑Positioners engineered to deliver smooth, backlash‑free motion with resolution down to 0.1 µm. Whether you are landing DC needles on sub‑micron transistor gates or aligning RF probes for 110 GHz measurements, our positioners provide the mechanical rigidity and thermal stability required for repeatable, drift‑free probing. With magnetic, vacuum, and bolt‑down base options, AIMRSE positioners integrate seamlessly with our probe stations and are compatible with most third‑party platforms.

Positioner Mechanics & Precision Engineering

Precision micro-positioners with magnetic and vacuum bases Fig 1: AIMRSE micro‑positioners configured for DC and RF probing applications.

AIMRSE micro‑positioners utilize precision linear stages with crossed‑roller bearings or precision dovetail slides, depending on the application. Coarse travel of 12 mm in X, Y, and Z axes enables rapid probe tip positioning, while fine adjustment knobs provide sub‑micron resolution for final contact. All axes are preloaded to eliminate backlash, and the entire assembly is thermally compensated to minimize drift during long measurement sequences. Probe mounting interfaces accept standard probe arms, RF probe bodies, and custom holders. Our positioners are the foundation of reliable probing in applications including semiconductor device characterization, RF and mmWave testing, failure analysis, and MEMS device probing.

Available Micro‑Positioner Configurations

Standard Linear Positioners

12 mm X‑Y‑Z Travel, 0.5 µm Resolution
Precision dovetail slides with spring‑loaded anti‑backlash nuts. Ideal for general‑purpose DC and low‑frequency probing. Available with magnetic or vacuum bases.

Ultra‑Fine Resolution Positioners

Differential Micrometer Drives, 0.1 µm Resolution
For sub‑micron device geometries. Crossed‑roller bearing stages provide exceptional smoothness and long‑term stability for extended measurements.

RF & mmWave Positioners

Planarization & Theta Adjustment
Precision tilt stages ensure flat probe tip landing for consistent contact impedance. Compatible with waveguide and coaxial probe bodies up to 110 GHz.

Vacuum‑Compatible Positioners

UHV‑Rated Materials & Low Outgassing
Constructed with vacuum‑compatible lubricants and materials. Bakeable to 150 °C. For integration into high‑vacuum and ultra‑high vacuum probe stations.

Core Engineering Advantages

Zero‑Backlash Preload System

Each axis is factory‑preloaded to eliminate mechanical play. This ensures that probe tip motion directly follows the micrometer knob with no dead zone, critical for navigating dense device layouts and avoiding accidental damage.

Thermal Drift Compensation

Materials with matched coefficients of thermal expansion are used throughout the positioner assembly. This minimizes tip movement during ambient temperature fluctuations or when used with thermal chucks, ensuring contact stability over hours of continuous measurement.

Flexible Mounting & Compatibility

Choose from magnetic bases for rapid repositioning, vacuum bases for secure hold on non‑magnetic platens, or bolt‑down bases for permanent installation. Our positioners are compatible with AIMRSE probe stations and can be adapted to fit most commercial platforms.

Micro‑Positioner FAQ

What is the difference between standard and ultra‑fine resolution positioners?

Standard positioners use precision dovetail slides with 0.5 µm resolution, suitable for most DC and RF probing. Ultra‑fine positioners use crossed‑roller bearings and differential micrometers to achieve 0.1 µm resolution, ideal for sub‑micron gate probing and long‑term stability applications.

Can I use these positioners on a non‑AIMRSE probe station?

Yes. Our positioners are available with magnetic, vacuum, and bolt‑down bases that are compatible with most commercial probe station platens. Custom adapter plates are available for specific non‑standard mounting configurations.

What type of probe holder interface is provided?

Standard positioners include a universal probe arm mount that accepts AIMRSE probe arms and most industry‑standard holders. Adapters for RF probe bodies (SMA, 2.92 mm, waveguide) are available.

Are vacuum‑compatible positioners truly UHV rated?

Yes. Our vacuum‑compatible positioners are constructed with low‑outgassing materials, dry lubricants, and vented screws. They are rated for operation down to 1×10⁻⁹ mbar and can be baked to 150 °C for chamber conditioning.

How do I maintain and clean my positioners?

Routine maintenance is minimal. Keep the slides free of debris and apply a light film of the supplied precision lubricant annually. Do not use solvents on the bearing surfaces. For vacuum positioners, specific dry lubricants are used—contact us for maintenance guidance.

Custom Positioner Engineering Services

Need a Specific Positioner Configuration?

From custom travel ranges and mounting interfaces to vacuum compatibility and multi‑axis ganging, our engineering team can design positioners tailored to your exact experimental requirements. Receive a detailed specification sheet and 3D CAD model.

Request Quote

Please specify travel requirements, resolution needs, mounting method, and whether vacuum compatibility is required.

Note: All AIMRSE probe systems and components are designed exclusively for professional semiconductor R&D and industrial testing. Equipment must be operated by trained personnel in accordance with standard laboratory safety protocols.

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