Vacuum

Q: Why do I need a vacuum probe station instead of probing in ambient air?

Ambient air contains moisture that creates conductive paths, masking true leakage current. High vacuum eliminates these effects, enabling accurate sub-picoampere measurements.

Q: What vacuum level is sufficient for my application?

For most semiconductor measurements, 1×10⁻⁵ to 1×10⁻⁶ mbar is sufficient. For surface-sensitive devices, UHV below 1×10⁻⁹ mbar is recommended.

Q: Can I heat or cool the sample inside the vacuum chamber?

Yes, thermal chucks can heat to 300°C or cool to -65°C. Vacuum prevents condensation and oxidation.

Q: How many probes can be installed in the vacuum chamber?

Standard chambers accommodate up to six micro-positioners. Larger chambers are available for more complex setups.

Q: Do you offer integration with existing vacuum equipment?

Yes, we design custom flanges and adapters to integrate with your existing pumps, gauges, and transfer systems.

Request a Quote

Cat	Products Name	Product Highlights	Price
AIMRSE-PS-V-1	Compact Vacuum / High-Low Temperature Probe Station T-CV4Mini	Mini 1–2" wafer probing	Request a Quote
AIMRSE-PS-V-2	High Vacuum / High-Low Temperature Probe Station T-CV4	1–4" high-vacuum test	Request a Quote
AIMRSE-PS-V-3	High Vacuum / High-Low Temperature Probe Station T-CV6	1–6" high-vacuum probing	Request a Quote

Overview

The Standard for Low‑Noise Electrical Characterization: Accurate measurement of low‑current, high‑impedance semiconductor devices demands an environment free from electrical interference, moisture, and surface contamination. At AIMRSE, we manufacture Vacuum Probe Stations engineered to deliver a pristine, high‑vacuum environment for precision I‑V, C‑V, and low‑frequency noise measurements. Our systems achieve base pressures down to 1×10⁻⁶ mbar, effectively eliminating leakage currents induced by humidity and suppressing parasitic capacitance. Whether characterizing photodetectors, MEMS devices, or next‑generation transistors, AIMRSE vacuum probe stations provide the dark, controlled environment essential for extracting true device performance.

System Architecture & Vacuum Integrity

High-vacuum probe station with micro-positioners and turbomolecular pump Fig 1: AIMRSE high‑vacuum probe station configured for low‑leakage semiconductor characterization.

AIMRSE vacuum probe stations are constructed around a robust stainless steel chamber with precision‑machined flanges and viewports. A dry pumping system, typically consisting of a turbomolecular pump backed by a scroll or diaphragm pump, achieves clean, oil‑free high vacuum within minutes. The sample platen is thermally isolated and may be upgraded with heating or cooling capabilities. Up to six micro‑positioners can be mounted on the chamber ports, each sealed with vacuum‑compatible bellows or o‑ring feedthroughs to maintain chamber integrity. Proprietary low‑leakage triaxial cabling and guarded probe arms ensure that measurement noise floors remain in the femtoampere range. Our systems are widely deployed in research laboratories for MEMS device characterization, photodetector dark current analysis, high‑resistivity semiconductor testing, and low‑frequency noise spectroscopy.

Available Vacuum Configurations

High‑Vacuum Analytical Stations

Base Pressure to 1×10⁻⁶ mbar
Turbomolecular‑pumped chambers with full viewport access. Ideal for standard semiconductor device characterization, photodiode dark current measurements, and MEMS probing under controlled atmosphere.

Ultra‑High Vacuum (UHV) Systems

Pressures below 1×10⁻⁹ mbar
All‑metal sealed chambers with ion pump compatibility. Designed for surface science experiments, atomic layer deposition (ALD) device testing, and applications requiring minimal outgassing.

Thermal Vacuum Probe Stations

In‑Vacuum Heating to 300 °C
Integrated resistive heaters with PID control for temperature‑dependent measurements under vacuum. Prevents oxidation and enables true intrinsic material characterization.

Custom Chamber & Port Configurations

Tailored Flange Sizes and Feedthroughs
Custom port arrangements for specialized RF, fiber optic, or high‑voltage feedthroughs. Designed to match your existing equipment footprint and experimental requirements.

Core Engineering Advantages

Ultra‑Low Leakage Current Performance

All internal wiring uses guarded triaxial cables with sapphire‑insulated feedthroughs. Guard potential driven to the signal line effectively eliminates parasitic leakage paths, enabling current measurements below 1 fA. Combined with a dry, high‑vacuum environment, surface leakage is suppressed by orders of magnitude compared to ambient probing.

Rapid Pump‑Down & Sample Exchange

A vent‑and‑pump cycle takes less than 5 minutes with our integrated vent valve and turbo pump controller. An optional load‑lock transfer system allows sample exchange without venting the main chamber, maintaining high vacuum for high‑throughput testing environments.

Vibration‑Isolated Probing

The chamber and platen are mounted on a rigid granite base with passive or active vibration isolation. This decouples the probe tips from floor vibrations and pump‑induced oscillations, ensuring stable contact even during extended low‑current measurements.

Vacuum Probing FAQ

Why do I need a vacuum probe station instead of probing in ambient air?

Ambient air contains moisture that condenses on device surfaces, creating conductive paths that mask true device leakage current. Additionally, oxygen can oxidize contacts and alter device characteristics. A high‑vacuum environment eliminates these effects, enabling accurate sub‑picoampere measurements and preventing sample degradation during long test sequences.

What vacuum level is sufficient for my application?

For most semiconductor I‑V and C‑V measurements, a base pressure of 1×10⁻⁵ to 1×10⁻⁶ mbar is adequate to eliminate surface leakage. For surface‑sensitive devices (e.g., organic semiconductors, 2D materials) or long‑term stability tests, an ultra‑high vacuum (UHV) system below 1×10⁻⁹ mbar is recommended to minimize contamination and outgassing.

Can I heat or cool the sample inside the vacuum chamber?

Yes. AIMRSE vacuum stations can be equipped with thermal chucks capable of heating to 300 °C or cooling to ‑65 °C (with recirculating chillers). The vacuum environment prevents condensation at low temperatures and oxidation at high temperatures, enabling true temperature‑dependent characterization.

How many probes can be installed in the vacuum chamber?

Standard AIMRSE vacuum chambers accommodate up to six micro‑positioners around the sample platen. Larger chambers with additional ports are available for complex multi‑terminal device characterization or for integrating optical fibers and additional instrumentation.

Do you offer integration with existing vacuum equipment?

Absolutely. We can design custom chamber flanges and adapter plates to mate with your existing turbo pumps, vacuum gauges, or sample transfer systems. Our engineering team ensures mechanical and electrical compatibility with your laboratory infrastructure.

Custom Vacuum Engineering Services

Ready to Specify Your Vacuum Probe Station?

From chamber size and pump configuration to custom electrical feedthroughs and sample stage options, our applications engineers will translate your measurement requirements into a fully integrated vacuum probing solution. Receive a detailed quotation, 3D CAD model, and pump‑down performance curves.

Request Quote

Please specify required base pressure, number of probes, sample size, and any thermal control requirements for optimal system configuration.

Note: All AIMRSE probe systems and components are designed exclusively for professional semiconductor R&D and industrial testing. Equipment must be operated by trained personnel in accordance with standard laboratory safety protocols.

Contact Form