High Vacuum / High-Low Temperature Probe Station T-CV4
Catalog NO.: AIMRSE-PS-V-2
Designed for electrical characterization of 1-4" wafers, batch devices, single chips, and MEMS. Suitable for I/V curve testing, C/V testing, and RF S-parameter measurements. Supports interchangeable cryogen and compressor cooling. Compatible with source meters, semiconductor parameter analyzers, LCR meters, and network analyzers.
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| Product Highlights | 1–4" high-vacuum test |
| Chuck Size | 2" (standard), 3"/4" (optional) |
| Temperature Range | -196°C/-150°C/-120°C/-100°C/-60°C to 100°C/150°C/200°C/300°C (optional); Resolution: 0.1°C; Stability: ±0.5°C (@30°C/min) |
| Vacuum / Chamber | 10⁻¹ / 10⁻² / 10⁻³ / 10⁻⁴ / 10⁻⁵ / 10⁻⁶ Torr (optional) |
| Microscope / Optics | Monocular microscope (standard); 30X~150X magnification; Focus range: 0~30mm; External LED ring light / coaxial light (standard) |
| Manipulator / Probe | 4 probe arms (standard); X-axis travel: 50mm (standard); Y/Z travel: 12mm (standard); Probe tip diameter: 1/2/5/10/20/50/100/200µm; Material: Tungsten alloy / Beryllium copper |
| Imaging System | HD 1080P camera; Photo/Video/Measurement functions; 21-22" HD monitor (standard) |
| Cooling Method | LN2 (standard), Cryocooler; 30L LN2 Dewar (standard), 50/60/100L (optional); PID control, DC 24V |
| Fixture Type | 800W~1500W |
| Power | Approx. 60~85KG |
| Weight | Approx. 750×620×650mm (excl. stand, varies with microscope) |
| Dimensions | ≤55dB |
| Noise Level | 1~10pA (standard) / 100fA level |
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