Microscope Systems

Q: What magnification do I need for my application?

7x to 45x for general probing; up to 200x for sub-micron features and failure analysis.

Q: Can I add a camera to an existing microscope?

Yes, trinocular port accepts C-mount cameras; HD USB and HDMI cameras available for retrofit.

Q: What is the advantage of coaxial illumination?

Eliminates shadows on reflective surfaces like gold bond pads, essential for accurate probe placement.

Q: Is the microscope compatible with vacuum or cryogenic chambers?

Yes, long-working-distance objectives focus through viewports; heated windows available for cryogenic use.

Q: Can I use the microscope for photonic or electroluminescence imaging?

Yes, trinocular port adapts for sensitive cameras; optical fiber and filter integration available.

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Cat	Products Name	Product Highlights	Price
AIMRSE-PC-MS-1	M Plan Apo	Long-working objective	Request a Quote
AIMRSE-PC-MS-2	M Plan Apo HR	High-res objective	Request a Quote
AIMRSE-PC-MS-3	M Plan Apo SL	Extra-long working distance	Request a Quote
AIMRSE-PC-MS-4	M Plan Apo	Wide-field objective	Request a Quote
AIMRSE-PC-MS-5	CF Plan TI/DI	White-light interference	Request a Quote
AIMRSE-PC-MS-6	CF Plan DI EPI	White-light metrology	Request a Quote
AIMRSE-PC-MS-7	M Plan Apo NIR / M Plan Apo NIR HR	NIR laser objective	Request a Quote
AIMRSE-PC-MS-8	LCD Plan Apo NIR	LCD NIR processing	Request a Quote
AIMRSE-PC-MS-9	M Plan Apo NUV / M Plan Apo NUV HR	NUV laser objective	Request a Quote
AIMRSE-PC-MS-10	LCD Plan Apo NUV	LCD NUV processing	Request a Quote

Overview

Visual Precision for Accurate Probe Placement: Clear, high‑resolution visualization of probe tips and device features is essential for accurate wafer probing. At AIMRSE, we provide Microscope Systems engineered specifically for probe station integration. Our stereo‑zoom microscopes deliver crisp, high‑contrast images with magnification ranges suitable for viewing entire wafers down to sub‑micron device features. With options for HD digital cameras, coaxial illumination, and long‑working‑distance objectives, AIMRSE microscope systems ensure that you can position probes with confidence and document your measurements with professional image quality.

Optical Design & Probe Station Integration

Stereo-zoom microscope with HD camera on boom stand Fig 1: AIMRSE microscope system configured for probe station visualization and documentation.

AIMRSE microscope systems are built around precision stereo‑zoom optics with magnification ranges from 0.7× to 4.5× zoom and total magnification up to 200× with appropriate objectives and eyepieces. Long‑working‑distance objectives provide ample clearance for probe arms and positioners, while coaxial epi‑illumination ensures uniform lighting on reflective wafer surfaces. A sturdy boom stand with 360° rotation and fine‑focus adjustment allows the microscope to be positioned optimally over the sample. HD digital camera integration enables live image viewing on a monitor and capture of high‑resolution still images for documentation and failure analysis reports. Our microscope systems are trusted for wafer inspection and alignment, probe tip placement verification, failure analysis documentation, and photon emission and electroluminescence imaging.

Available Microscope Configurations

Stereo‑Zoom Microscopes

0.7×–4.5× Zoom, Up to 45× Total Magnification
Wide field of view for wafer navigation and probe placement. Ideal for routine DC and RF probing with 1 µm to 10 µm feature sizes.

High‑Magnification Systems

Up to 200× Total Magnification
Additional objective lenses and high‑power eyepieces for viewing sub‑micron gate structures. Essential for advanced semiconductor nodes and failure analysis.

HD Digital Camera Integration

1080p/4K Live View and Image Capture
USB 3.0 or HDMI cameras with measurement software. Eliminates eyestrain and enables collaborative viewing on large monitors.

Specialty Illumination Options

Coaxial, Ring Light, and Oblique Illumination
Tailored lighting for specific sample types, including highly reflective metal pads, transparent substrates, and rough surfaces.

Core Engineering Advantages

Long Working Distance Optics

Objectives with working distances up to 100 mm provide ample clearance for probe arms, positioners, and RF probe bodies. This allows the microscope to be positioned for optimal viewing without interfering with the measurement setup.

Coaxial Epi‑Illumination

Light is directed through the microscope objective, providing uniform, shadow‑free illumination perpendicular to the wafer surface. This is essential for viewing features on highly reflective metal pads and for critical dimension measurements.

Vibration‑Isolated Mounting

The boom stand includes a rigid post and adjustable arm with locking mechanisms. For sensitive applications, the stand can be mounted on the same vibration‑isolation platform as the probe station, ensuring that the microscope image remains stable.

Microscope System FAQ

What magnification do I need for my application?

For general probe placement and wafer navigation, 7× to 45× total magnification is sufficient. For viewing sub‑micron transistor gates or performing failure analysis, magnification up to 200× with high‑numerical‑aperture objectives is recommended.

Can I add a camera to an existing microscope?

Yes. Most AIMRSE microscopes include a trinocular port that accepts C‑mount cameras. We offer HD USB and HDMI cameras that can be retrofitted to existing systems for live viewing and image capture.

What is the advantage of coaxial illumination?

Coaxial illumination provides light that travels along the same optical path as the viewing axis. This eliminates shadows and provides uniform illumination of highly reflective surfaces such as gold bond pads, making it essential for accurate probe placement on metal features.

Is the microscope compatible with vacuum or cryogenic chambers?

Yes. We offer long‑working‑distance objectives that can focus through vacuum viewports and cryostat windows. For cryogenic applications, we can provide heated windows to prevent fogging.

Can I use the microscope for photonic or electroluminescence imaging?

Yes. Our trinocular port can be adapted for sensitive cameras (CCD, sCMOS, InGaAs) for low‑light imaging. We can also integrate optical fibers and filters for specific wavelength imaging applications.

Custom Microscope Engineering Services

Ready to Configure Your Microscope System?

From magnification requirements and working distance to camera integration and specialized illumination, our team will specify a microscope system that provides the clarity and documentation capabilities your laboratory demands.

Request Quote

Please specify required magnification range, working distance, camera needs, and any vacuum or cryogenic compatibility requirements.

Note: All AIMRSE probe systems and components are designed exclusively for professional semiconductor R&D and industrial testing. Equipment must be operated by trained personnel in accordance with standard laboratory safety protocols.

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