RF / Microwave

Q: What frequency range do your RF probe stations support?

Standard systems support DC to 40 GHz. Upgraded configurations support DC to 67 GHz and DC to 110 GHz with appropriate connectors and waveguides.

Q: What calibration methods are supported?

SOLT, LRM, and TRL are supported. We provide NIST-traceable ISS substrates and integration with major VNA calibration software.

Q: Can I perform load pull measurements with this system?

Yes, we offer integration with mechanical or active tuners from Maury, Focus, and others for automated impedance and power sweeps.

Q: How do you handle thermal drift during long RF measurements?

Granite base and low-expansion materials minimize drift. Thermal chucks with active control and re-calibration at temperature are available.

Q: Is an EMI-shielded enclosure necessary?

Recommended for general use, essential for noise figure, receiver sensitivity, and OTA measurements to reduce ambient interference.

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Cat	Products Name	Product Highlights	Price
AIMRSE-PS-RF-1	Double-Sided Probe Station for PCB RF Testing	Large PCB & RF probing	Request a Quote
AIMRSE-PS-RF-2	DC/RF Testing Probe Station	Expandable DC/RF/THz test	Request a Quote
AIMRSE-PS-RF-3	RF Probe Station for Terahertz Applications	200mm automatic THz test	Request a Quote
AIMRSE-PS-RF-4	Information unavailable	Info unavailable	Request a Quote
AIMRSE-PS-RF-5	Manual Probe Station for DC/RF Wafer-Level Testing	12-inch low-leakage test	Request a Quote
AIMRSE-PS-RF-6	Fully Automatic Probe Station for RF/mmW/THz Applications	300mm fully automatic test	Request a Quote
AIMRSE-PS-RF-7	High-Low Temperature Semi-Automatic Probe Station	12-inch semi-automatic test	Request a Quote
AIMRSE-PS-RF-8	High Power Probe Station	High-power device testing	Request a Quote
AIMRSE-PS-RF-9	Double-Sided PCB Probe Station	Double-sided PCB probing	Request a Quote
AIMRSE-PS-RF-10	Semi-Automatic Probe Station for RF/DC Wafer-Level Testing	300mm semi-automatic test	Request a Quote

Overview

High‑Frequency Characterization Without Compromise: As wireless communication expands into mmWave frequencies for 5G, 6G, and satellite applications, the accuracy of on‑wafer S‑parameter measurements becomes paramount. At AIMRSE, we manufacture RF & Microwave Probe Stations engineered to deliver precise, repeatable high‑frequency characterization up to 110 GHz. Our systems minimize insertion loss, maintain signal integrity, and provide the mechanical stability required for accurate vector network analyzer (VNA) calibration and device under test (DUT) measurement. From small‑signal transistors to integrated phased‑array antennas, AIMRSE RF probe stations are the trusted platform for millimeter‑wave device development and production testing.

System Architecture & High‑Frequency Integrity

RF microwave probe station with multiple positioners and calibration substrate Fig 1: AIMRSE RF probe station configured for mmWave S‑parameter and load pull measurements.

AIMRSE RF probe stations are built on a rigid granite base with active vibration isolation to ensure sub‑micron probe placement stability. The platen accommodates calibration substrates and wafer chucks up to 200 mm, with precision planarization to maintain consistent probe contact impedance. RF micro‑positioners offer 0.5 µm resolution and are compatible with standard waveguide, coaxial, and probe‑style interfaces from DC to 110 GHz. Low‑loss phase‑stable cables and precision adapters maintain calibration integrity from the VNA port to the probe tip. An optional EMI‑shielded enclosure suppresses ambient interference for sensitive noise figure and gain compression measurements. Our systems are essential for 5G/6G front‑end module testing, mmWave IC characterization, radar transceiver development, and high‑speed photonic device analysis.

Available RF & Microwave Configurations

mmWave Probe Stations (up to 110 GHz)

Broadband DC to 110 GHz
Precision positioners with 1.0 mm or 1.85 mm coaxial interfaces. Low‑loss waveguide transitions for W‑band. Ideal for 5G FR2, E‑band backhaul, and automotive radar device characterization.

Load Pull & Noise Parameter Systems

Active and Passive Tuning
Integrated impedance tuners and noise receivers for measuring Γ_opt, noise figure, and power contours. Automated software for fast characterization of power amplifiers and low‑noise amplifiers.

Multi‑Port & Differential RF Probing

Up to 8 RF Ports Simultaneously
Configurations for differential and multi‑port devices. Supports SOLT, LRM, and TRL calibration structures with automated positioner alignment.

EMI‑Shielded & Anechoic Chambers

Suppress Interference to ‑100 dBm
Fully shielded enclosures with RF‑absorbing foam for over‑the‑air (OTA) and antenna pattern measurements. Essential for regulatory compliance and low‑level receiver testing.

Core Engineering Advantages

Planarization & Contact Repeatability

Precision theta‑adjustable positioners ensure that RF probe tips land flat on the wafer surface, minimizing pad damage and ensuring consistent contact resistance. The rigid platen and granite base maintain tip alignment over thousands of touchdowns, critical for production test environments.

Low‑Loss Signal Path

Our RF cabling and probe interfaces are selected for minimal insertion loss and phase stability. Typical insertion loss from VNA port to probe tip is less than 2.5 dB at 40 GHz, with phase‑stable performance across temperature and flexure.

Integrated Calibration Substrates

Every RF system includes a NIST‑traceable impedance standard substrate (ISS) with precisely defined thru, reflect, and line standards. Combined with our software interface, this enables accurate on‑wafer calibration and de‑embedding of parasitic effects.

RF & Microwave Probing FAQ

What frequency range do your RF probe stations support?

Standard AIMRSE RF probe stations support DC to 40 GHz using 2.92 mm (K) connectors. Upgraded configurations support DC to 67 GHz (1.85 mm V) and DC to 110 GHz (1.0 mm) with appropriate waveguide transitions and positioners. We can configure the system to match your specific band of interest.

What calibration methods are supported?

Our systems support all standard on‑wafer calibration techniques, including SOLT (Short‑Open‑Load‑Thru), LRM (Line‑Reflect‑Match), and TRL (Thru‑Reflect‑Line). We provide ISS substrates with traceable standards and can integrate with Keysight, Rohde & Schwarz, and Anritsu VNA calibration software.

Can I perform load pull measurements with this system?

Yes. AIMRSE offers load pull integration with mechanical or active tuners from Maury Microwave, Focus Microwaves, and others. The system can be configured with extra RF ports, bias tees, and software control to fully automate impedance and power sweeps.

How do you handle thermal drift during long RF measurements?

Our granite base and low‑expansion materials minimize thermal drift. For temperature‑dependent RF measurements, we offer thermal chucks with active temperature control and the ability to re‑calibrate at each temperature setpoint using an integrated ISS on the thermal chuck.

Is an EMI‑shielded enclosure necessary?

For most S‑parameter measurements of active devices, a shielded enclosure is not strictly required but recommended to reduce ambient interference. For noise figure, receiver sensitivity, and OTA measurements, a shielded enclosure is essential to achieve accurate, repeatable results.

Custom RF Engineering Services

Ready to Configure Your RF & Microwave Probe Station?

From frequency range and number of RF ports to thermal chuck and enclosure options, our applications team will specify a system that meets your exact device characterization needs. Receive a full system quotation, RF path loss budget, and 3D CAD model.

Request Quote

Please specify your frequency range of interest, number of RF and DC ports, and any load pull or thermal requirements.

Note: All AIMRSE probe systems and components are designed exclusively for professional semiconductor R&D and industrial testing. Equipment must be operated by trained personnel in accordance with standard laboratory safety protocols.

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