Fully Automatic Probe Station for RF/mmW/THz Applications
Catalog NO.: AIMRSE-PS-RF-6
This fully automatic probe station shares the same functionality as the TS3000-SE model but achieves full automation through a wafer loading platform. It is equipped with a shielded environment for ultra-low noise measurements. Suitable for DC-IV/CV, RF/millimeter-wave, and wafer-level reliability testing.
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| Product Highlights | 300mm fully automatic test |
| Chuck Size | 300mm (12 inches) |
| Temperature Range | -60°C to 300°C |
| Vacuum / Chamber | Shielded environment |
| Microscope / Optics | Programmable microscope stage |
| Manipulator / Probe | - |
| Anti-Vibration | Built-in vibration isolation system |
| Fixture Type | Shielded environment |
| Key Features / Applications | Wafer loading platform (supports up to 5 wafers); fA-level ultra-low noise IV measurements; Safety Test Management System (STM™); Automatic dew point control |
| RF Frequency Support | 26GHz to 110GHz or higher |
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