Probe Systems
High-Precision Wafer Characterization Platforms
Our Probe Systems division represents the pinnacle of semiconductor test engineering, delivering comprehensive solutions for the non-destructive electrical characterization of wafers and chips. As semiconductor devices scale down to the nanometer regime and expand into wide-bandgap materials, the requirements for testing environments have become increasingly rigorous. Our probe stations are designed not merely as mechanical holders, but as sophisticated environmental chambers that isolate the Device Under Test (DUT) from external noise, vibration, temperature fluctuations, and electromagnetic interference.
We provide a complete ecosystem of probing solutions ranging from basic manual stations for university laboratories to fully automated, vacuum-integrated systems for advanced R&D. Whether you are investigating the quantum mechanical properties of qubits at 4 Kelvin, characterizing the S-parameters of 6G communication chips at 110 GHz, or testing the breakdown voltage of SiC power modules at 10 kV, our systems ensure that the data you capture is a true reflection of device performance, uncorrupted by the test environment.
Constructed with high-grade materials such as anodized aluminum, stainless steel, and granite, our stations offer superior mechanical stability. This rigidity is essential for maintaining micron-level probe placement accuracy over extended testing periods, particularly during thermal cycling where material expansion can cause probe drift. Integrated with advanced optics and compatible with all major parametric analyzers, our probe systems are the foundation of reliable semiconductor analytics.
Probe System Technical Comparison
| System Type | Temp Range | Chamber Pressure | Probe Configuration | Key Applications |
|---|---|---|---|---|
| Cryogenic | 4K to 475K (LHe) 77K to 475K (LN2) |
High Vacuum (< 10⁻⁶ Torr) |
4-6 Arms Thermal Anchoring |
Quantum Computing, Superconductivity, Low-Temp Physics |
| Vacuum | Ambient to 200°C (Hot Chuck) |
Vacuum / Inert Gas (N2/Ar Backfill) |
DC / RF / Fiber Up to 8 Arms |
MEMS, Sensors, Organic Semiconductors, Oxidation Sensitive |
| RF / Microwave | -60°C to 300°C (Shielded) |
Ambient / EMI Shielded | North/South/East/West GSG / GS / SG |
5G/6G Comms, Radar, mmWave ICs, Signal Integrity |
| Magnetic Field | 80K to 500K | Variable Field | Non-magnetic Arms Horizontal/Vertical |
Spintronics, Hall Effect, Magneto-transport |
| High Power | Ambient to 300°C | Anti-arcing Fluid | High Voltage / Current Triaxial Guarding |
SiC/GaN Devices, IGBTs, Power MOSFETs |
| Standard / Manual | RT (Upgradeable) | Ambient | Modular Coarse/Fine Stage |
Basic IV/CV, Failure Analysis, University Teaching |
Engineering Guide: Selecting Your Configuration
Environmental Considerations:
- Cryogenic Testing (4K): Mandatory for quantum research to minimize thermal noise. Requires a vacuum environment to prevent icing on the sample. Thermal anchoring of probe arms is critical to prevent heat transfer to the DUT.
- Vacuum vs. Atmospheric: Choose vacuum systems for MEMS (to eliminate air damping) or organic materials (to prevent oxidation). For high-voltage testing, vacuum or high-pressure gas can also prevent arcing.
- Thermal Management: For reliability testing (NBTI/HCI), our thermal chucks provide uniformity better than ±0.5°C. When going below freezing, a dry air purge or vacuum is required to prevent frost.
- Shielding Requirements: For measuring currents below 100fA, a Dark Box (Faraday Cage) is essential to block EMI/RFI and light noise.
Application Requirements:
- RF / mmWave: Requires a system with high mechanical rigidity to ensure probe planarity. Short, rigid RF arms are used to minimize signal loss. Calibration substrates (ISS) must be mountable on the auxiliary chuck.
- High Power (SiC/GaN): Safety is paramount. Systems must include high-voltage interlocks and anti-arcing liquid trays (using Fluorinert) to test breakdown voltages >3kV safely.
- Magnetic Field: Requires specialized electromagnets. Note that using magnetic fields often restricts the use of magnetic materials in probe arms and screws.
- Wafer Size: Ensure the chuck size (2", 4", 6", 8", 12") matches your maximum sample size. Larger chucks can accommodate smaller samples, but not vice versa.
Probe System Categories
Cryogenic Probe Systems
Designed for the frontiers of physics, our Cryogenic Probe Systems provide a stable, low-temperature environment for characterizing quantum devices, superconductors, and novel materials. Utilizing continuous flow cryostats, these systems can reach base temperatures of 4K using Liquid Helium (LHe) or 77K using Liquid Nitrogen (LN2).
The vacuum chamber is engineered to minimize radiative heat transfer, while specialized thermally anchored probe arms ensure that the probe tip temperature matches the sample temperature. This system is essential for minimizing thermal noise and observing phenomena such as carrier freeze-out and the quantum Hall effect.
View Cryogenic Systems
Vacuum Probe Systems
Our Vacuum Probe Systems create a pristine, controlled environment free from atmospheric contaminants. Capable of reaching high vacuum levels (up to 10⁻⁶ Torr), these stations are critical for testing materials that degrade in the presence of oxygen or moisture, such as organic semiconductors (OLEDs/OPVs) and unpassivated MEMS devices.
The system also supports backfilling with inert gases like Nitrogen or Argon, allowing for high-temperature testing without oxidation. The chamber design includes multiple feedthroughs for DC, RF, and optical probes, offering versatility for diverse material science applications.
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RF / Microwave Systems
Engineered for high-frequency signal integrity, our RF/Microwave Systems are the standard for characterizing 5G/6G components, radar systems, and millimeter-wave ICs. Built on a massive granite base for superior vibration damping, these stations feature high-precision platens that ensure accurate planarization of Ground-Signal-Ground (GSG) probes.
The system integrates seamlessly with Vector Network Analyzers (VNAs) and supports industry-standard calibration substrates (ISS) for SOLT and TRL calibration. With cabling options extending up to 110 GHz and beyond (THz), these stations ensure repeatable S-parameter extraction and load-pull testing.
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Magnetic Field Systems
For research into spintronics, magneto-transport, and the Hall effect, our Magnetic Field Systems integrate powerful electromagnets directly into the probe station. These systems can generate uniform magnetic fields up to 1.5 Tesla, with options for both horizontal (in-plane) and vertical (perpendicular) field orientations.
The probe arms and stage components are manufactured from non-magnetic materials to prevent interference. The variable bipolar power supply allows for precise control of field strength and direction, enabling automated hysteresis loop measurements and carrier mobility characterization.
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High Power Systems
Designed for the rigorous demands of power electronics, our High Power Systems enable safe on-wafer characterization of Wide Bandgap (WBG) devices like SiC and GaN. Capable of handling voltages up to 10 kV and pulsed currents up to 100 A, these stations are essential for measuring breakdown voltage (BV) and on-resistance (Rds-on).
To prevent electrical arcing (flashover) at high voltages, the system supports immersion in anti-arcing fluids (such as Fluorinert) or high-pressure gas environments. Comprehensive safety features, including redundant interlocks and grounded enclosures, ensure operator safety during high-voltage testing.
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Standard / Manual Systems
The Standard Manual Series is the cost-effective workhorse for university laboratories, failure analysis, and basic R&D. Featuring a robust modular design, these stations provide a stable platform for general IV/CV characterization and device troubleshooting.
Equipped with coarse and fine stage controls, high-quality stereo zoom optics, and a vibration-damping base, they offer an intuitive user experience. The system is highly upgradeable, allowing users to add thermal chucks, laser cutters, or shielded dark boxes as their research needs evolve.
View Manual SystemsApplications by Industry
Quantum & Superconductivity
Characterization of qubits, Josephson junctions, and novel superconducting materials at ultra-low temperatures (4K).
5G/6G Communications
Testing of mmWave power amplifiers, filters, and antenna arrays requiring precise S-parameter measurement up to 110 GHz.
Automotive Power Electronics
Reliability testing of SiC MOSFETs and IGBTs for electric vehicle inverters, focusing on high-voltage breakdown and thermal cycling.
MEMS & Sensor Technology
Performance verification of accelerometers, gyroscopes, and pressure sensors in controlled vacuum or pressure environments.
Spintronics Research
Investigation of magnetic memory devices (MRAM) and spin valves under variable magnetic fields and temperatures.
Failure Analysis
Defect localization and root cause analysis of semiconductor failures using precise probing and laser cutting techniques.
Engineering Services & Support
Our commitment to your success extends beyond the delivery of hardware. We offer a full suite of engineering services to ensure your probe system meets your exact requirements:
- Custom Engineering: Design of bespoke chucks, probe holders, and chambers for non-standard samples.
- Installation & Training: Global on-site installation and comprehensive training for your engineering team.
- Calibration Services: Regular system calibration and preventative maintenance to ensure data accuracy.
- Application Consulting: Expert advice on test methodologies and system configuration for complex measurements.
Note: All AIMRSE probe systems and components are designed exclusively for professional semiconductor R&D and industrial testing. Equipment must be operated by trained personnel in accordance with standard laboratory safety protocols.
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