By Application
Semiconductor characterization is not a monolithic discipline. The parasitic capacitance that ruins a high-frequency RF measurement is irrelevant in high-current DC testing. Conversely, the high-voltage arcing that threatens Power Electronics is non-existent in low-voltage logic circuits.
We do not believe in "one-size-fits-all" probe stations. Instead, we offer Application-Specific Configurations. Each solution is pre-validated to address the unique electrical, thermal, and mechanical challenges of your specific research domain.
Semiconductor Characterization (IV/CV & Reliability)
The Challenge: Signal-to-Noise Ratio (SNR).
For logic (CMOS, FinFET), memory (DRAM/NAND), and analog devices, the primary battle is against leakage current and noise. Measuring sub-threshold leakage in the femtoampere (fA) range or capacitance in the femtofarad (fF) range requires an environment that is electrically quieter than the device itself.
We extend the guard potential from the Source Measure Unit (SMU) all the way to the probe tip holder. This "Active Guarding" eliminates cable leakage, allowing accurate measurements down to 10 fA / 0.1 fA resolution.
Our shielded enclosures provide >100dB EMI attenuation and complete light-tightness (less than 1 lux), essential for preventing photon-generated current (photovoltaic effect) in sensitive junctions.
Fig 1: A fully shielded environment optimized for IV/CV parameter extraction and 1/f noise measurement.
Recommended Configuration for WLR (Wafer Level Reliability):
- Thermal Chuck: Ambient to +300°C with better than ±1°C uniformity.
- Software: Automated stepping for multi-die HCI/NBTI stress testing over 1000+ hours.
- Probes: Tungsten tips with controlled overdrive to prevent pad damage during long-duration contact.
RF, mmWave & Terahertz (5G/6G)
The Challenge: The Parasitic Enemy.
As frequencies climb into the mmWave spectrum (24GHz - 110GHz) for 5G FR2 and automotive radar applications, the wavelength becomes shorter than the probe itself. A millimeter of cable length deviation or a slight impedance mismatch causes massive signal reflection (Return Loss) and phase errors.
| Frequency Band | Typical Application | Our Configuration Highlight |
|---|---|---|
| DC - 40 GHz | High-Speed Digital, Ku/K Band Radar | Standard RF Probes with rigid micro-positioners for stable contact. |
| 40 GHz - 67 GHz | 5G Networks, WiGig (802.11ad) | Waveguide integration and specialized calibration substrates (ISS). |
| 67 GHz - 110 GHz+ | Automotive Radar (77GHz), 6G Research | Frequency Extenders (VNA Modules) mounted directly on the platen to minimize cable loss. |
Fig 2: Micrometric planarization of Ground-Signal-Ground (GSG) probes is critical for accurate S-parameter extraction.
On-Wafer Calibration
We support SOLT, TRL, and LRM calibration methods. Our chucks feature dedicated auxiliary sites for Impedance Standard Substrates (ISS) to de-embed probe parasitics.
Planarity Control
Specialized RF probe arms with Theta (θ) planarization adjustment ensure both Ground and Signal tips contact the wafer simultaneously to prevent mode conversion.
Power Electronics (SiC & GaN)
The Challenge: High Voltage & High Current Density.
Wide Bandgap (WBG) semiconductors like Silicon Carbide (SiC) and Gallium Nitride (GaN) are redefining power conversion. However, characterization presents a safety and physics paradox: testing at 3kV or 10kV creates immense risk of arcing (flashover) between probe needles, damaging both the DUT and the expensive analyzer. Furthermore, On-Resistance (Rds-on) measurements require milliohm-level precision.
Our high-power chambers are pressurized with dielectric fluids (like Fluorinert™) or clean dry air (CDA) to suppress ionization (Paschen's Law), enabling safe wafer-level testing up to 10kV / 600A.
Utilizing multi-finger high-current probes and true Kelvin sensing configurations to eliminate lead resistance, ensuring accurate Rds(on) measurement even at high current densities.
Redundant hardware interlocks integrated with the dark box door and the SMU (Source Measure Unit) to instantly cut high voltage if the enclosure is breached.
Fig 3: Specialized high-voltage probe cards and fluid baths allow for breakdown voltage testing without air ionization.
Quantum Computing & Spintronics
The Challenge: The Battle Against Entropy.
Quantum devices (Qubits, Josephson Junctions) and Spintronic materials require environments near absolute zero to preserve coherence states. Thermal energy and external magnetic fields are the enemies of quantum observation.
We offer specialized Cryogenic-Magnetic Probe Stations that allow researchers to probe devices while subjecting them to extreme physical conditions.
Closed-cycle cryostats utilizing Liquid Helium (LHe) or Nitrogen (LN2) to reach temperatures as low as 4K (or 1.5K pumped), with active PID control to maintain stability within ±10mK.
Integration of horizontal or vertical superconducting electromagnets (up to 2.5 Tesla) allows for the study of Hall Effect, Quantum Hall Effect, and magnetoresistance in novel materials.
Vacuum pumps are noisy. We use flexible bellows and decoupled pump lines to ensure that mechanical noise from the cryostat pump does not transfer to the probe tip, protecting delicate nanostructures.
Fig 4: A 4K cryogenic station equipped with a vertical magnetic field generator for spintronics research.
Optoelectronics & Photonics
The Challenge: Aligning Electrons and Photons.
Testing Laser Diodes (VCSELs, EELs) and Photodetectors requires a dual approach: precise electrical contact combined with optical access. Standard probe stations often block the optical path or lack the mechanical resolution to align fibers to micron-scale active areas.
- Double-Sided Probing: For vertical devices, we offer simultaneous top and bottom access. The optical fiber can collect light from the top while electrical probes bias the device from the bottom.
- Active Alignment: Piezo-controlled fiber positioners with <100nm resolution allow for automated peak-power search, ensuring maximum coupling efficiency during L-I-V sweeps.
Application FAQ
Do you service third-party probe stations?
What is the typical warranty period?
Can you integrate my existing Keysight B1500A?
Do you offer emergency on-site repair or remote diagnostics?
Can you upgrade the software/firmware on older probe stations?
Build Your Application-Specific Solution.
Whether you are pushing the boundaries of frequency, power, or temperature, we have a configuration that fits your physics. Discuss your specific measurement requirements with our application engineers today.
Note: All AIMRSE probe systems and components are designed exclusively for professional semiconductor R&D and industrial testing. Equipment must be operated by trained personnel in accordance with standard laboratory safety protocols.
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