High Power Probe Station
Catalog NO.: AIMRSE-PS-RF-8
These are dedicated high power probe stations for characterizing high power devices on wafers over a wide temperature range (-60°C to +300°C). Voltage measurement ranges up to 3kV (triaxial)/10kV (coaxial) and current up to 600A. Shielded environment technology is employed for ultra-low noise measurements.
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| Product Highlights | High-power device testing |
| Chuck Size | Supports thin wafer or Taiko wafer testing |
| Temperature Range | -60°C to +300°C |
| Vacuum / Chamber | Shielded environment technology |
| Fixture Type | Shielded environment technology |
| Key Features / Applications | Voltage: 3kV (triaxial)/10kV (coaxial); Current: 600A; The fully automatic version supports automated wafer handling (150mm SiC, 200mm GaN, 300mm SiGe); Wafer loading platform technology |
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