4-inch Heating Chuck
Catalog NO.: AIMRSE-PC-TC-3
A compact precision heating chuck designed for wafer probing applications with smaller sample sizes. Available in 4-inch size with full customization options for material, shape, and performance specifications.
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| Product Highlights | Compact 4-inch chuck |
| Temperature Range | Ambient to 200°C/300°C/400°C/500°C/600°C (optional) |
| Power | 200W~2000W (DC heating) |
| Features | Optional multi-channel temperature detection |
| Material | Aluminum alloy, Oxygen-free copper, Gold-plated (optional) |
| Size | 4 inches |
| Shape | Round, Square (customizable) |
| Temperature Uniformity | ±0.1°C / ±0.5°C / ±1.0°C |
| Temperature Stability | ±0.1°C / ±0.5°C / ±1.0°C (affected by environment) |
| Surface Flatness | ±1μm / 1.5μm / 2μm / 2.5μm (optional) |
| Cooling | Optional air cooling |
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