6-inch Probe Station T-150C
Catalog NO.: AIMRSE-PS-S-4
Designed for I/V curve testing, C/V testing, and RF S-parameter measurements of 1-6 inch wafers, batch devices, single chips, and MEMS. Features fine practicality and high cost performance. Ideal for laboratory chip verification, failure analysis, and production line RF chip S-parameter testing. Compatible with source meters, semiconductor parameter analyzers, LCR meters, and network analyzers.
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| Product Highlights | Cost-effective 6-inch test |
| Chuck Size | 6 inches (152mm) standard |
| Temperature Range | Ambient standard; Optional: 100°C/200°C/300°C/400°C |
| Microscope / Optics | Stereo microscope standard (8X~50X); Monocular microscope optional (30X~150X); Focus range: 0-30mm; LED light standard, Coaxial/Cold light optional |
| Manipulator / Probe | MP-150 probe holders standard (MP-180/200 optional); 2 probe positions standard (2-6 optional); Probe precision: ±0.7μm standard (±0.5/0.35μm optional) |
| Positioning Precision | ±0.7μm standard |
| Imaging System | HD 1080P industrial camera optional (photo/video/measurement) |
| Fixture Type | Coaxial probe fixture standard; RF probe arm optional; Imported triaxial probe fixture optional; BNC connector standard; SMA/3.5mm/2.92mm/2.4mm/1.0mm/Triaxial/Banana plug optional |
| Weight | Approx. 50-75KG |
| Dimensions | 610×590×600mm |
| RF Frequency Support | DC~1MHz/100MHz/1GHz/40GHz/50GHz/67GHz/110GHz optional |
| Chuck X/Y Travel | 6"×6" (152×152mm) |
| Features | Fine lead screw displacement with handle control; Vacuum adsorption with 4 independent valves; Chuck rotation fine adjustable; Chuck Z-lift: 0-10mm; Chuck material: Aluminum standard, Ceramic/PTFE/Gold-plated optional; Probe tip diameter: 0.5-100μm optional; 10-12" HD monitor optional |
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