8" High/Low Temperature Probe Station T-200HC
Catalog NO.: AIMRSE-PS-C-3
Designed for I/V, C/V, and RF parameter testing on 1" to 8" wafers, batch devices, single chips, and MEMS. Features a wide temperature range (-55°C to 300°C) with PID-controlled LN2 or compressor cooling, anti-frost technology, and high-precision positioning. Suitable for laboratory chip verification, failure analysis, and RF S-parameter testing in production lines.
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| Product Highlights | Wide temp-range wafer test |
| Chuck Size | 8 inches (203mm diameter); X/Y travel: 8"x8" (203mmx203mm); Material: Aluminum (standard), Ceramic/PTFE/Gold-plated (optional) |
| Temperature Range | -55°C to 100°C (standard); -60°C/-55°C to 100°C/150°C/200°C/300°C (optional) |
| Vacuum / Chamber | Non-vacuum (open system); Nitrogen purge available |
| Microscope / Optics | Monocular microscope (standard); 30X~150X magnification; Focus range: 0~30mm; LED/coaxial/cold light source |
| Manipulator / Probe | MP-180 probe holders (standard); 2 to 8 probe positions; Probe precision: ±0.5μm (standard), ±0.7μm/±0.35μm (optional) |
| Positioning Precision | Probe: ±0.5μm; Microscope focus: manual; Chuck rotation: fine adjustment |
| Imaging System | HD 1080P industrial camera; Photo/Video/Measurement functions; 21~22" HD monitor included |
| Cooling Method | LN2 with PID control (standard); Compressor cooling (optional); 30L LN2 Dewar (standard), 50/60/100L (optional); Argon circulation system |
| Anti-Vibration | Built-in damping (sponge base); Weight: 85~120kg; Dimensions: 670×775×850mm |
| Fixture Type | Coaxial probe (standard); BNC connector; RF probe arms (optional); Triaxial probes (optional); DC probe tips: 0.5~100μm |
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