Analytical Probe Station for IV/CV and RF (6"/8"/12")
Catalog NO.: AIMRSE-PS-C-1
Designed for high-precision DC, CV, and RF measurements on wafers up to 12 inches. The system integrates a shielded chamber to minimize noise, a temperature-controlled chuck, and a flexible microscope platform. It supports various testing needs including failure analysis, laser cutting, and probe card compatibility. The rigid gantry and anti-vibration base ensure measurement stability.
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| Product Highlights | High-precision IV/CV/RF testing |
| Chuck Size | 6", 8", 12" (gold-plated stainless steel) |
| Temperature Range | -60°C to 200°C (expandable) |
| Vacuum / Chamber | High-shielded chamber, nitrogen purge (no condensation) |
| Microscope / Optics | Metallurgical, Video, Stereo, Opto-current; Microscope movement: 2"x2"x2" (1μm precision); Pneumatic lift (50.8mm) |
| Manipulator / Probe | 0.5μm / 0.7μm / 1μm; Travel: 12.5mm (X-Y-Z); Mounting: Magnetic/Vacuum/Screw |
| Positioning Precision | Chuck XY: 1μm; Microscope: 1μm; Chuck rotation: 360° (coarse/fine) |
| Imaging System | CCD: 2MP/5MP/12MP; HDMI output; Photo/Video/Scale functions; Integrated display |
| Cooling Method | Air-cooled, Liquid Nitrogen, TEC (optional) |
| Anti-Vibration | Air damping system; Vertical: 1.5Hz; Load capacity: >400kg |
| Fixture Type | Coaxial (10pA), Triaxial (100fA), RF with positioning pins |
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