Cryogenic Probe Station for IV/CV and RF (77K to 473K)
Catalog NO.: AIMRSE-PS-C-2
This system enables precise electrical characterization under extreme thermal conditions, ranging from cryogenic (77K) to high temperatures (473K). It includes a high-vacuum chamber with radiation shielding, automated LN2 flow control for efficient cooling, and high-resolution microscopy for accurate probe placement. Designed for DC, CV, and RF applications with flexible probe arm configurations.
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| Product Highlights | 77K–473K cryogenic probing |
| Chuck Size | 2" or 4" (with thermal sink design) |
| Temperature Range | 77K to 473K (-196°C to 200°C); Precision: ±0.1°C |
| Vacuum / Chamber | Size: 8" (4" viewport); Leak rate: <1.3×10⁻¹⁰ Pa·m³/s; Radiation shield; Cryopump option: 5×10⁻⁴ Pa |
| Microscope / Optics | HD Video Microscope (0.75X~5X); 40X~280X magnification; Resolution: <1μm; Optional metallurgical microscope |
| Manipulator / Probe | XYZ travel: 50mm×25mm×25mm; Linear motion (backlash-free); Precision: 2μm; DC/RF/Fiber optic arms available |
| Positioning Precision | Probe: 2μm; Microscope: <1μm |
| Imaging System | HD CCD: 2MP/5MP/12MP; HDMI output; Photo/Video/Scale; Integrated display |
| Cooling Method | Automatic LN2 flow control; 35L Dewar with casters; Manual/Auto mode |
| Anti-Vibration | Pneumatic vibration isolation; Vertical: 1.5Hz; Horizontal: 1.2Hz; Load capacity: >400kg; Built-in compressor |
| Fixture Type | Coaxial (10pA), Triaxial (100fA), RF, Fiber optic; Gold-plated tips; Thermal sink design |
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