DH Series Comprehensive Probe Station
Catalog NO.: AIMRSE-PS-S-12
A comprehensive wafer test probe station capable of testing up to 12-inch wafers. Features industry-leading quick chuck movement and a three-stage lift probe platform for fast separation without losing focus, also facilitating probe card use. Widely used in large labs and fabs for IV/CV characterization of ICs, chips, MEMS, PCB components, and materials. Supports pad electrodes >1μm and probe card testing.
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| Product Highlights | Comprehensive 12-inch test |
| Chuck Size | 6, 8, 12 inches (316 stainless steel, gold-plated) |
| Temperature Range | Ambient |
| Microscope / Optics | Compatible with stereo, video, and metallurgical microscopes; Pneumatic microscope lift; CCD imaging |
| Manipulator / Probe | DC or RF probe holders optional (0.5/0.7/1μm) |
| Positioning Precision | Microscope: 1μm (travel 2"×2"×2"); Platform lift: 1μm |
| Imaging System | CCD imaging |
| Fixture Type | Triaxial (100fA) / Coaxial (10pA) |
| Chuck X/Y Travel | Matched to chuck size; Built-in quick air-float movement |
| Features | High-rigidity gantry; Three-stage lift probe platform: 5mm quick, 250μm fine, 25mm fine adjustment (1μm); Chuck: 360° quick, 5mm quick lift, 6mm fine lift (1μm); Vacuum adsorption (ring/multi-hole, independent); Adaptive damping; Anti-static |
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