DM Series Basic Probe Station

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Catalog NO.: AIMRSE-PS-S-10

DM Series Basic Probe Station

Designed for basic wafer testing in university education and small laboratory research. Compact structure, precision design, affordable price, and flexible configuration. Compatible with instruments for IV/CV, I-t/V-t, optoelectronic, 1/f noise, device characterization, and RF testing. Recommended for devices with pad electrodes >50μm.

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Product Highlights Basic educational probing
Chuck Size 4, 6, 8 inches (316 stainless steel, gold-plated)
Temperature Range Ambient
Microscope / Optics Compatible with stereo and video microscopes; CCD imaging system with photo/video/scale functions
Manipulator / Probe DC or RF probe holders optional (0.5/0.7/1μm precision)
Positioning Precision Probe: 0.5μm, 0.7μm, 1μm optional
Imaging System CCD imaging system
Fixture Type Triaxial (100fA) / Coaxial (10pA)
Chuck X/Y Travel Matched to chuck size
Features Integrated design, compact footprint; Can be placed inside glove boxes; Adaptive damping base; U-shaped nickel-plated platform; Two back electrodes (180° design); Chuck Z: 5mm quick lift, optional 6mm fine lift (1μm); Vacuum adsorption (ring/multi-hole, independent); Anti-static grounding

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