DN Series Enhanced Probe Station
Catalog NO.: AIMRSE-PS-S-11
An enhanced wafer test probe station capable of testing up to 12-inch wafers. Features a high-rigidity microscope gantry with precision X-Y-Z adjustment. Chuck has both quick and fine lift for efficient sample-probe separation and probe card loading. Widely used in research and fabs for IV/CV characterization of ICs, chips, MEMS, PCB components, materials, die wafers, LEDs, LCDs, and solar cells. Supports pad electrodes >1μm.
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| Product Highlights | Enhanced 12-inch test |
| Chuck Size | 4, 6, 8, 12 inches |
| Temperature Range | Ambient |
| Microscope / Optics | High-rigidity gantry microscope with pneumatic lift; Precision X-Y-Z adjustment |
| Positioning Precision | Supports pad electrodes >1μm |
| Fixture Type | Triaxial (100fA) / Coaxial (10pA) |
| Chuck X/Y Travel | Matched to chuck size; Optional 360° quick movement |
| Features | High-rigidity gantry with pneumatic lift; Both quick and fine chuck lift; Strong upgradeability: optional 360° quick chuck movement, optional photocurrent scanning imaging or Raman-transient fluorescence lifetime imaging |
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