DSH Series Double-Sided Probe Station
Catalog NO.: AIMRSE-PS-S-14
A self-developed double-sided probe station capable of front and back probing of up to 12-inch wafers. Enables simultaneous probing of both sides for various optoelectronic tests, or back probing with front light collection. Features excellent mechanical systems and multiple upgrade options. Widely used in laser diode, LD/LED/PD intensity and wavelength testing.
X
X
| Product Highlights | Double-sided wafer probing |
| Chuck Size | 4, 6, 8, 12 inches (316 stainless steel, gold-plated) |
| Temperature Range | Ambient |
| Microscope / Optics | Top: stereo/video/metallurgical microscopes (pneumatic lift); Bottom: video microscope; Both with CCD imaging |
| Manipulator / Probe | DC or RF probe holders optional for top and bottom (0.5/0.7/1μm) |
| Positioning Precision | Probe: 0.5/0.7/1μm optional; Top microscope: 1μm (2"×2"×2" travel) |
| Imaging System | Dual CCD imaging systems (top and bottom) |
| Fixture Type | Triaxial (100fA) / Coaxial (10pA) |
| Chuck X/Y Travel | Matched to chuck size; 8"/12" with quick air-float movement |
| Features | Double-layer design for simultaneous front/back probing; Can load DC and RF signals simultaneously; Sample stage: high-transparency glass or hollow design, 5mm quick lift; Chuck: large handle dual drive, optional 360° quick movement; High-rigidity gantry for top microscope; Adaptive damping; Anti-static |
Contact Form
