High-Low Temperature Vacuum Probe Station
Catalog NO.: AIMRSE-PS-C-8
A probe test platform designed for electrical parameter testing of semiconductor chips. It provides a controlled environment with a wide temperature range and vacuum capability to prevent oxidation, enabling accurate measurement of voltage, current, resistance, and CV characteristics for material and chip analysis.
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| Product Highlights | Ultra-wide temp & vacuum |
| Chuck Size | 4/6/8/12 inch |
| Temperature Range | -142 to 600°C |
| Key Features / Applications | Temperature uniformity ±3℃; Probe repositioning precision 2µm |
| Vacuum Level | ≤2Pa (mechanical pump); ≤3*10^(-3)Pa (turbo pump) |
| Probe Specifications | Positional Accuracy: 3µm resolution; Triaxial Probe: 100fA leakage |
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