High-Precision Motorized Probe Station

As a core component of a probe station, the probe station is mainly used to connect probes and cables, providing a conduction condition for electrical parameter testing of semiconductor chips. It can be distinguished by adjustment accuracy (10 μm/5 μm/3 μm/1 μm/0.5 μm, etc.), operation mode (manual/electric), and application scenario (universal/universal/L-type, etc.). Widely used in electrical parameter testing in semiconductor and optoelectronics industries. This new electric 5-phase high-precision probe station achieves sub-micron positioning without low-speed jitter. Used with a multi-axis control system and handwheel, it enables single or multi-axis linkage (up to 9 axes with 3 probes). Technical Advantages: Main body: imported aviation aluminum, sandblasted oxidation. Drive: 5-phase stepper motor, sub-micron precision. Control: PC software and handle dual-mode. Holder: multi-functional (180° rotation + 60° directional tilt). Controller: integrated, for single or multi-axis linkage. Base: adjustable magnetic (10Kg). Optional vacuum (7L/min pump). Specs: Travel: 15mm XYZ. Precision: ~1 μm. Manual lift: 15mm travel, 0.5 μm resolution. Leakage: 10pA (coaxial), 100fA (triaxial). Connectors: Coaxial (BNC, clip, banana, N-type, SMA), Triaxial (Triaxial). Range: Current 10pA/100fA-10A, Voltage max 1000V. Application: RF, I/O, DC, wafer, resistor, solar, photocurrent, semiconductor testing.