Professional 6-inch Medium Probe Station T-150
Catalog NO.: AIMRSE-PS-RF-11
Designed for I/V curve testing, C/V testing, and RF S-parameter measurements of 1-6 inch wafers, batch devices, single chips, and MEMS. Offers high stability and ease of use with Air Bearing Stage technology for enhanced functionality. Ideal for laboratory chip verification, failure analysis, and production line RF chip S-parameter testing. Compatible with source meters, semiconductor parameter analyzers, LCR meters, and network analyzers.
X
X
| Product Highlights | 6-inch high-stability test |
| Chuck Size | 6 inches (152mm) standard; 8 inches (203mm) optional |
| Temperature Range | Ambient (standard) |
| Vacuum / Chamber | Non-vacuum (open system) |
| Microscope / Optics | Stereo microscope (standard) 8X~50X; Monocular microscope (optional) 30X~150X; Metallurgical microscope (optional) 50X~1000X; Focus range: 0-30mm; LED light (standard), Coaxial/Cold light (optional) |
| Manipulator / Probe | MP-150 probe holders (standard); MP-180/200 (optional); 2 probe positions standard (up to 6 optional); Probe travel: X/Y 6"×6" (152×152mm); Chuck Z-lift: 0-10mm |
| Positioning Precision | ±0.7μm (standard); ±0.5μm, ±0.35μm (optional) |
| Imaging System | HD 1080P industrial camera with photo/video/measurement functions (optional); 21-22" HD monitor (optional) |
| Cooling Method | Not applicable (ambient temperature only) |
| Anti-Vibration | Built-in damping (included in base); Weight: 50-75kg |
| Fixture Type | Coaxial probe fixture (standard); RF probe arm (optional); Triaxial probe fixture (optional); BNC connector (standard); SMA/3.5mm/2.92mm/2.4mm/1.0mm/Triaxial/Banana plug (optional) |
| Weight | Approx. 50-75kg (varies by configuration) |
| Dimensions | 610×590×600mm |
| RF Frequency Support | DC~1MHz/100MHz/1GHz/40GHz/50GHz/67GHz/110GHz (optional) |
Contact Form
