Semi-Automatic High Voltage / High Current Probe Station
Catalog NO.: AIMRSE-PS-H-3
Provides high power measurements for 8-inch and smaller wafer devices. Advanced ShieldEnvironment™ provides low noise and shielded test environment. Features interlock safety light curtain that shuts down instruments to protect users from accidental high voltage. ArcShield™ on chuck prevents arcing between chuck and platen. Supports high voltage probes up to 10kV (coaxial) and 3kV (triaxial), and high current probes up to 200A (pulse). Integrated solution for characterizing 2-pin and 3-pin power devices including FETs, BJTs, diodes, capacitors (up to 3kV and 100A).
| Product Highlights | 8-inch semi-auto HV test |
| Chuck Size | 8 inches and smaller |
| Temperature Range | -60°C to 300°C |
| Vacuum / Chamber | ShieldEnvironment™ for EMI/RFI/Light-Tight shielding |
| Manipulator / Probe | High voltage probes (HVP) with various connector options; High current probes (HCP) with multi-finger monolithic design |
| Positioning Precision | fA-level low leakage measurements |
| Fixture Type | Triaxial/coaxial connections |
| Voltage / Current Range | Voltage: up to 10kV (coaxial) / 3kV (triaxial); Current: up to 200A (pulse), up to 600A (pulse) for some configurations |
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