Semi-Automatic High Voltage Probe Station
Catalog NO.: AIMRSE-PS-H-4
Versatile and cost-effective probe station for wafer-level high power device measurements from 20°C to 300°C, with measurement capability up to 3kV (triaxial)/10kV (coaxial) and 600A (pulse). Features ArcShield™ to prevent arcing between chuck and probe platen. Supports up to 12 high voltage micropositioners (up to 3kV triaxial or 10kV coaxial) or 4 multi-finger high current micropositioners (up to 400A). Can be configured with various instrument connection kits.
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| Product Highlights | 8-inch darkbox HV test |
| Chuck Size | 8 inches |
| Temperature Range | 20°C to 300°C |
| Vacuum / Chamber | DarkBox (light-tight environment) |
| Manipulator / Probe | Up to 12 HV micropositioners (3kV triaxial/10kV coaxial); Up to 4 multi-finger high current micropositioners (up to 400A) |
| Fixture Type | Triaxial/coaxial connections |
| Voltage / Current Range | Voltage: up to 3kV (triaxial)/10kV (coaxial); Current: up to 600A (pulse) |
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