Temperature-Controlled Probe Station

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Catalog NO.: AIMRSE-PS-S-21

Temperature-Controlled Probe Station

A high-precision temperature-controlled probe station designed for research. It combines precise probe positioning with accurate temperature control (PID heating) to measure the electrical performance of chips and devices as a function of temperature.

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Product Highlights PID Temperature Control Probe
Chuck Size ≤12 inches
Temperature Range Ambient to 300°C
Key Features / Applications PID control with ±0.1°C accuracy; Uniformity ±5°C; Supports up to 6 DC or 4 RF probes.
Leakage Current 10pA / 100fA (in shield box)
Model 3 µm

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